具高靈敏度生物感測之矽锗奈米線於氟強化鈍化處裡技術應用之特性研究

Investigation of Fluorine enhanced oxide passivation on SiGe nanowire with high sensitivity bio-sensor

張泰源(Tai-Yuan Chang)

指導教授 ： 張國明 ； 許博淵

國立交通大學/工學院/加速器光源科技與應用碩士學位學程/碩士(2015年)

https://doi.org/10.6842/NCTU.2015.00325

摘要

無資料

關鍵字

矽鍺 ； 奈米線 ； 生物感測器 ； 氟強化鈍化處裡 ； 靈敏度

並列摘要

無資料

並列關鍵字

Fluorine enhanced oxide passivation ； SiGe ； nanowire ； sensitivity ； bio-sensor

參考文獻

[1] Y. Cui, Q. Wei, H. Park and Charles M. Lieber, “Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species,” Science, vol. 293, no. 5533,pp. 1289-1292, August 17, 2001.

[2] G.Brambilla, F. Xu, and X. Feng, “Fabrication of optical fiber nanowires and their optical and mechanical characterization”, Electronic Letters, Vol 42, 8, 2006.

[3] Z. Gao, A. Agarwal, A. D. Trigg, N. Singh, C. Fang, C.H. Tung and K.D. Buddharaju, “SILICON NANOWIRE ARRAYS FORULTRASENSITIVE LABEL-FREE DETECTION OF DNA” Anal. Chem., 79 (9), pp. 3291–3297, 2007.

[4] P. R. Nair, and M. A. Alam, “Performance limit of Nano biosensors,” Applied Physics Letters, vol. 88, no. 23, 2006.

[5] Duan, C. Niu, V. Sahi, J.Chen, J. Parce, and S. Empedocles, “High-performance thin-film transistors using semiconductor nanowires and nanoribbons,” Nature 425, pp. 274-278, 2003.