雷射干涉儀於共焦顯微系統之軸向定位控制

Using Interferometer to Control Axial Position in Confocal Microscope

臧志仁(Chih-Jen Tsang)

指導教授 ： 李朱育

國立中央大學/工學院/機械工程學系/碩士(2006年)

摘要

本文架設一套差動式共焦顯微系統，並設計一模糊滑動控制器來抑制共焦顯微系統中掃描平臺的軸向擾動量。系統以麥克森干涉儀為感測器的位置回授裝置，實驗驗證，控制器可有效抑制12dB軸向擾動量，使掃描平臺動態定位穩態誤差小於25nm以下。
共焦顯微系統系統的縱向位移反應曲線斜率為2.03/?m，在考慮0.3%光源雜訊下，具有4nm的軸向解析度。本文選用鋁鍍膜試片作為樣本，經由自行架設的共焦顯微系統，經光強度-階高換算測得試片表面階高為369.4nm。

關鍵字

共焦顯微術 ； 干涉術 ； 模糊滑動控制 ； 精密定位控制

並列摘要

In thesis , A differential co confocal microscopy, which with a fuzzy controller for suppressing the longitudinal disturbance of scanner in confocal microscopy, was developed. The system use Michelson interferometer as position control sensor. The experimental result shows that the fuzzy controller is effective in 12dB of the longitudinal disturbance suppression. And the system''s position error is within 25nm.

The experimental result shows that the slop of the intensity versus longitudinal displacement (SILD) curve is enhanced to 2.03/?m. To consider 0.3% noise in the system, a depth resolution as high as 4 nm has been achieved. A al-coating step height was measured. According to the difference of intensity and the SILD, a 369.4 nm step height was obtained.

並列關鍵字

Confocal microscope ； Interferometry ； Fuzzy slidi

參考文獻

[ 1 ] E.ABBE, , Archiv. Mikros . Anat ., 9, 413. , (1873)

[ 3 ] T. Wilson and C. J. R. Sheppard, ”Theory and practice of scanning optical microscopy”, Academic Press, London, (1984)

[ 4 ] C.J.R. Sheppard and D.M. Shotton, ”Confocal laser scanning microscopy”, Springer, New York, (1997).

[ 5 ] S.W. HELL, ”Enhancing the axial resolution in far-field light microscopy :two-photon 4Pi confocal fluorescence microscopy”, Journal modern optics, VOL . 41, NO. 4, 675-681 , (1994)

[ 6 ] C. H. Lee, H. Y. Mong, and W. C. Lin, ”Noninterferometric wide-field optical profilometry with nanometer depth resolution”, Optics Letters. 27, pp.1773, (2002)