混合脊椎與外圍式之晶圓廠設施規劃

A research of blend spine-configuration with Perimeter-configuration facility layout problem

邱建旗(Jian-Chi Chiou)

指導教授 ： 何應欽

國立中央大學/管理學院/工業管理研究所/碩士(2007年)

摘要

目前國內半導體業者正積極投入設立12 吋晶圓廠，而半導體產業是屬於高資本投資的產業，興建一座半導體晶圓製造廠往往需要至少五至七佰億新台幣，且隨著新製程的改善，其所需的投資成本亦會隨著增加；再加上台灣土地狹小，價格昂貴，取得越來越不容易，以及晶圓廠本身的一些特性如廠房地板下需埋設管線設備以及晶圓製造的加工途程，具有高度的迴流（Reentrant），造成物料搬運活動非常頻繁，如果以傳統人工搬運車搬運晶圓，則效率必然低落等特性，使得晶圓廠一旦完工後，日後若想更改原始佈置顯得困難重重。因此，晶圓製造廠的佈置方式以及自動化搬運系統的配置在初期規劃階段就顯得格外的重要。
半導體產業中物流最佳化設計的目的是在於減少晶圓搬運損傷、提高良率及生產量、降低cycle time、減低在製品存量及縮短交期，因此，如何規劃出更有效率的廠房佈置，將有限的空間做最有效率的運用，進而提高生產績效、降低成本，成為現代製造系統中重要的一環，也成為企業獲益的重要因素。
本研究的主要動機在於運用設施規劃的方式，針對現有晶圓廠設施佈置及自動化物料搬運系統配置進行佈置改善，並透過啟發式演算法與數學模型來縮短晶圓間的搬運距離用以解決晶圓廠中Interbay系統的物料搬運問題，希望在考慮求解時間及解答品質下，得到一個最佳的佈置方案。同時更可以因為減少晶圓搬運距離而提高機器設備的使用率，並且降低晶圓的製造以及搬運成本。本研究將針對『晶圓廠內設施規劃』中『脊椎式』和『外圍式』混合的設施規劃問題做有系統的規劃與佈置。

關鍵字

設施規劃 ； 啟發式演算法 ； 數學模型 ； 模擬退火法 ； 流量分析法

並列摘要

In recent years, semiconductor manufacturing (SM) companies enthusiastically establish 300-mm fabs. However, establishing a new SM facility needs at least multi-billion US dollars. With the limited area in Taiwan, large footprints not only pose constraints for the facility designer but present challenge in the design of automatic material handling system (AMHS). SM is a highly sophiscated operation with various processes to be performed, and SM factories typically have reentrant flow to introduce the incresed number of process steps. In response to such challenge, it has become necessary to eliminate the manual handling of the wafers. As a result, facility layout design and AMHS are two major aspects to achieve a sucessful 300-mm fab.
The purpose of the optimazation of material transport is to reduce cycle time, work in process (WIP), delivery time, and increase yield. Therefore, the approach attepmpted to incorporate facility layout and AMHS simulataneously has become a critical factor on factory operation.
This paper focuses on using the integrated fab layout to achieve a short transportation distance of interbay by employing heuristic algorithm and mathematical programming model. In addition, this paper proposes this two-stage procedure can obtain a good quality solution. Based on this analysis, effective facility layout is shown to reduce tansportation distance of wafer lots, and increase equipment utility. This pape will mainly aimed double-loop configuration(which is blend spine-configuration with Perimeter-configuration) facility layout problem.

並列關鍵字

facility layout ； mathematical programming model ； Simulated Annealing ； heuristic algorithm ； flow line analysis

參考文獻

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