應用禁忌搜尋法於半導體晶圓廠之設施佈置問題

Applying the Tabu Search Algorithm on the Facilities Layout Problem for Semiconductor Fabrication Plant

林育德(Yu-De Lin)

指導教授 ： 胡黃德

元智大學/工程學院/工業工程與管理學系/碩士(2013年)

https://doi.org/10.6838/YZU.2013.00220

摘要

半導體產業屬於高成本投資產業，而興建一座12吋晶圓廠需要耗費新臺幣600億元以上。現今晶圓廠仍朝向更高的生產品質及導入更大的晶圓進行製造，而有效的設施佈置及物料搬運設備就扮演很重要的角色。本研究應用禁忌搜尋法於半導體晶圓廠之設施佈置問題，考慮包含脊椎式及外圍式的混合式佈置，針對六種不同的物料搬運模式 (單向順時針、單向逆時針、雙向、單向順時針加一捷徑、單向逆時針加一捷徑、雙向加一捷徑) 進行探討。藉由田口實驗設計，求取禁忌搜尋法的最佳參數組合，並對12個設施佈置案例 (8至20個工作站) 進行測試與分析。最後，本研究與文獻中其他演算法 (如模擬退火、基因演算法等) 所得之結果加以比較，結果發現禁忌搜尋法對於工作站個數小於20個的9組測試例題，針對雙向物料搬運中，有66%的測試例題所得到的最佳解優於目前已知最佳解。

關鍵字

禁忌搜尋法 ； 脊椎式佈置 ； 外圍式佈置

並列摘要

The cost of fabrication plant in the semiconductor industry is an expensive investment. Establishing a new fabrication plant of 12 inches needs more than NT$600 billion dollars. Nowadays, the semiconductor industry is trying to have higher quality of production and using larger wafers to manufacture. Furthermore, effective placement of equipment and material transportation both play very essential roles in the operation. This study applied the Tabu Search (TS) Algorithm on the facilities layout problem for semiconductor fabrication plant with six different material handling flow directions (one direction-clockwise, one direction-counterclockwise, bi-direction, one direction-clockwise with a short cut, one direction-counterclockwise with a short cut, and bi-direction with a short cut). By using Taquchi method to find out the best combination of the parameters on the 12 study cases of facilities layout problem with 8 to 20 bays and also compare the total cost with other algorithms (simulated annealing, genetic algorithm, etc). The results show that applying the Tabu search algorithm on the study cases with less than 20 bays, in bi-direction material handling system problems, 66% of study cases have the better solutions than the previous ones.

並列關鍵字

Tabu Search Algorithm ； Spine Layout ； Perimeter Layout

參考文獻

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