特殊有機廢溶劑純化再利用之研究

Purity and Reuse of Specific Organic Waste Solvent

謝福環(Fu-huan Hsieh)

指導教授 ： 李俊福

國立中央大學/工學院/環境工程研究所碩士在職專班/碩士(2007年)

摘要

本研究以三種不同脫水劑無水Na2CO3、無水Na2SO4、無水CaCl2進行五種廢光阻劑及廢去光阻劑進行脫水試驗，得到以下結論1.以Na2CO3為脫水劑，其對廢光阻劑-A及廢去光阻劑-D之除水效率較佳，對廢去光阻劑-B、C則不甚理想；2.以Na2SO4為脫水劑，其對廢光阻劑-A及廢去光阻劑-D之除水效率較佳，對廢去光阻劑-B、C則不甚理想；3.以CaCl2為脫水劑時，其對廢光阻劑-A之除水效率非常高，對廢去光阻劑-D及廢去光阻劑-E之除水效率亦佳，惟對廢去光阻劑-B、C之除水效率不佳。

實驗結果發現廢光阻劑-A以CaCl2為脫水劑靜置3小時，有最高之除水效率，較長的脫水時間其除水效率反而較不理想；另以Na2CO3、Na2SO4脫水，顯示其除水效率隨脫水時間之增加而增加。

實驗結果亦發現廢去光阻劑-D以Na2CO3、Na2SO4脫水，其除水效率佳，隨脫水時間之增加而增加；但以CaCl2為脫水劑靜置3小時，除水效率佳，較長的脫水時間，對除水效率沒有幫。

廢光阻劑及廢去光阻劑由於成分、種類過於複雜，導致廢去光阻劑-B及廢去光阻劑-C以脫水劑除水效率差，可嘗試以其他脫水劑進行實驗，以尋求最佳除水效率。

關鍵字

廢去光阻劑 ； 廢光阻劑 ； 除水效率 ； 脫水劑

並列摘要

Three kinds of dehydrated reagents, anhydrous sodium carbonate, anhydrous sodium sulfate, and anhydrous calcium chloride, are used to examine dehydrated efficiency for five waste photoresists and five waste strippers. The obtained results indicated as follows: (1) Anhydrous sodium carbonate shown the highest efficiency of dewater on the waste photoresist-A and the waste stripper-D, but the relative lower on the strippers-B and –C. (2) Anhydrous sodium sulfate indicated the relatively higher efficiency of dewater on the waste photoresists-A and –D. Similarly, poor efficiency was found on the strippers-B and –C. (3) Anhydrous calcium chloride for waste photoresist-A indicated a quite higher dewater efficiency. For waste photoresist-D and waste stripper-E, anhydrous calcium chloride presented a good dewater efficiency. However, the poor dehydrated efficiency was indicated on strippers-B and –C.

The experimental result also indicated that the best dewater efficiency of calcium chloride for waste photoresist-A was under static 3 hr. The longer static period of dewater will generate the lower efficiency. In addition, the dehydrated efficiency of sodium carbonate, and sodium sulfate increased with the increasing time of dewater. If sodium carbonate, and sodium sulfate were used as the dehydrated reagent for the waste stripper-D, the better efficiency of dewater can be found, and the efficiency also increase the increasing time.

The chemical components of the waste photoresists and the waste strippers are too complicated for understanding the dehydrated mechanism. Thus, reasons of less dehydrated efficiencies for the waste strippers-B and –C are difficultly explained. To test efficiency for other dehydrated reagent is needed for our future studies.

並列關鍵字

Photoresist ； Stripper ； Dewater efficiency ； dehydrated reagent

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