- 學位論文
面板廠應用廢光阻剝離劑回收系統回收廢印壓模洗劑
The Application of Waste Stripper Reclaim System to Reclaim Waste NMP in TFT-LCD Fab
摘要
薄膜電晶體液晶顯示器（Thin Film Transistor Liquid Crystal Display, TFT-LCD）產業因應市場需求的高速成長，各製造廠相繼投入次世代廠擴廠行列，玻璃基板尺寸逐步放大，相對各項化學品使用量與廢液產生量亦同步增高，對製造廠成本負荷與地球環境資源皆是一大損害，所以如何減少化學品耗量已成為各製造廠關切之問題。 目前各廠除製程化學品減量外，最普遍的就是回收系統的應用，除能有效降低製造成本外，亦能減少化學廢棄物的產生，對製造廠成本與資源再利用均有相當貢獻。根據調查目前國內面板製造廠化學品廠內回收再利用通常只侷限於光阻剝離液（Stripper）與正光阻顯影液（Tetra-Methyl-Ammonium-Hydroxide, TMAH）兩種，其中應用最普遍的即是光阻剝離液回收系統（Stripper Reclaim System, SRS）。 本研究即是利用目前面板製造廠現有光阻剝離液回收系統進行印壓模洗劑（N-Methyl-2-Pyrrolidinone, NMP）回收實驗，以驗證NMP廠內自行回收再利用之可行性。實驗流程首先進行可行性評估，包含Stripper與NMP化學特性比較、NMP廢液成份分析與實驗室模擬純化實驗，然後進行實機初步運轉實驗，並選定蒸餾塔塔頂溫度、薄膜蒸發器蒸氣壓力與薄膜蒸發器轉速作為可控因子進行參數調整實驗，最後進行經濟效益評估。 實驗分析結果經參數調整後，成品中不純物含量已可合於標準值，且較未調整前薄膜蒸發器蒸發率提升3.78％、系統整體回收率提升5.63％。由實驗結果可證實製程所排之NMP廢液，確實可經由此回收系統純化後再利用，與NMP未導入回收前進行比較，可發現每月可減少廢液產生量約28.24公噸，整體經濟效益可達每月279.9萬元。
並列摘要
In order to reflect the enormous growth of demand in TFT-LCD (Thin Film Transistor Liquid Crystal Display) market, numbers of manufacturers invest in the development of next-generation. With the enlargement of the glass size, the consumption of chemicals and generation of waste liquid have increased in phase. It costs damage to the environment and increases the capitalized cost of manufacturers. Therefore, how to reduce the consumption of chemicals had became the first issue to the manufacturers. At present, besides the reduction of chemical usage on process, the reclaim system is the general application, which is not only reducing the cost of production but also reducing the generation of chemical wastes. According to the survey, SRS is the general application between SRS and TMAH. The purpose of this study is using existing SRS（Stripper Reclaim System）to retrieve the NMP（N-Methyl-2-Pyrrolidinone）as the recycle experiment, which could identify the feasibility of recycle and reuse of NMP within the plant. Including feasibility and preliminary operating study, the temperature parameters of Distillation Column and the rotational speed of Thin Film Evaporator are also controllable factors in the experiment. After the adjustment of parameter in the reclaim system experiment, not only the impurity content is below the value of standard, but also the evaporation rate of Thin Film Evaporator increases 3.78% and the recovery efficiency of whole system increases 5.63%. According to the result, it has been confirmed that the waste liquid of NMP can be re-use after purification of reclaim system. The generation of waste NMP has been declined 28.24 tons per month and perform NTD$2,799,000 per month as saving capital.