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  • 學位論文

以非結晶塑膠熱壓成型法製作微凸球面結構之研究

A study of fabrication micro convex spherical structure in amorphous resin through hot embossing

指導教授 : 顏炳華
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摘要


一般微細產品的製程技術常採用沈積、光微影、蝕刻、雷射加工、LIGA等,製造成本昂貴。本實驗則利用微放電技術,製作半徑0.05mm深0.02mm的微凹球面之模具,再運用熱壓成型機,對非結晶性透明塑膠材料有ABS、PMMA、PC等,以粒重約為0.01g~0.016g,進行微凸球面結構之熱壓塑膠成型。 近年由於光學產業包括、數位相機、傳統相機、攝影器材、光學元件、眼鏡、導光板、背光模組、LCD等各式樣的光學凹凸透視鏡等產品,其所使用的透明塑膠材質大都以PMMA、PC為主軸ABS為輔搭配ABS樹脂混成複合材料,開發業界所需要的新物性。因此本實驗將以ABS、PMMA、PC三種塑膠材料為實驗材料,探討其成型時,溫度、壓力、時間等對塑膠成型之影響。 經由熱壓實驗結果獲知,ABS、PMMA、PC等材料之高精度成型,除上述參數外,冷卻溫度的掌控、微凹球面模具的材質的選用及研磨拋光製程的改善等,對塑膠微凸球面結構之產品,亦有極大的影響。實驗結果顯示適當的加工參數組合,微結構球面之粗糙度可達Ra 0.030μm,且其微形球面之直徑僅約50μm,合乎一般製造導光板為主的光電廠要求。本研究所使用之方法雖然相當簡易,但其微形球面的成型精度良好,將對該領域產業技術的提昇有所助益。

關鍵字

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並列摘要


The common MEMS processed technology often limits to deposits, lithography etching, laser processing, LIGA etc, So the production cost is expensive. This experiment uses the micro EDM technology, manufacture mold with radius 0.05mm depth 0.02mm micro concave spherical, using the hot embossing machine formation, and processed has material amorphous resin ABS, PMMA, PC, the grain weight approximately is 0.01g~0.016g, then for micro convex spherical structure use hot embossing formation. In recent years the optics industry including: digital camera, traditional camera, photographic equipment, optics part, lens, back light mold, and LCD optics of concave convex, almost uses PMMA, PC transparent material. ABS is auxiliary and matches the resin to mix the compound material. Therefore this experiment by ABS, PMMA and PC three kind of plastic materials discusses the formation’s the temperature, the pressure, and time etc, to forming influence the precision. According to the hot embossing experimental results show that, ABS, PMMA, and PC etc, was high precision material to form , with besides the above parameters, control the cooling temperature , and the micro concave spherical mold quality selects, and grinding polished the system the improvement etc, to product of the micro convex spherical structure, was important influence parameter. The experimental result demonstration suitable processing parameter combination, roughness of the microstructure spherical may reach Ra 0.030μm , its micro shape diameter was approximately 50μm spherical , completes conforms with the general manufacture light guide board of the optics plant request. Although the experimentation method was simple, but its micro shape spherical precision forming was good for industry technology development.

並列關鍵字

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參考文獻


9. Heckele, M. Bacher, W.and Muller, K. D."Hot Embossing –the Molding Technigue for Plastic Microstructures”, Microsystem Technology,Vol.4,pp.122-124 (1998).
10. Holger Becker and Heim, U."Hot Embossing as a Method for the Fabrication of Polymer High Aspect Ratio Structure”, Sensor and Actuators A,Vol.83,pp.130-135 (2000).
11.Ong, N. S., Koh, Y. H. and Fu, Y. Q “Microlens Array Produced Using Hot Embosssing Process”,Microelectronic Engineering, Vol.60,pp.365-379 (2002).
12.Terry Koerner, Laurie Brown, Ruixi Xie, Richard D. Oleschuk “Applications of micro hot embossing for optical switch formation”,Sensors and Actuators A, Vol.119, pp.433–440 (2005).
13.Terry Koerner, Laurie Brown, Ruixi Xie, Richard D. Oleschuk

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