基於雙光子光致聚合技術之四軸微製造系統製作高深寬比結構之研究

Research of High Aspect Ratio Structure Fabricated by Four-axis Micro-manufacturing System based on Two-photon Photopolymerization Technology

謝岳廷(Yue-ting Xie)

指導教授 ： 廖昭仰

國立中央大學/工學院/機械工程學系/碩士(2015年)

摘要

雙光子聚合(Two Photon Polymerization)微製造是一項新穎的技術，其特點為以層層堆疊的方式製作任意且複雜之立體微結構，但由於TPP微製造之最小成形單位─體素為類似於橢圓體的形狀，於一般三軸之系統架構製作微結構時因體素尺寸關係而造成結構失真，對此本研究提出利用四軸系統架構，藉由旋轉樹酯承載台讓體素以不同於傳統三軸架構的堆疊方式進行堆疊。本論文首先以一般傳統三軸的方式，改變雷射功率與曝光時間製作體素點陣列，利用掃描式電子顯微鏡量測體素之縱向與橫向尺寸，建立起本實驗室之資料庫，接著利用四軸系統製作高深寬比陣列，來驗證四軸架構之可行性，經過實驗成果顯示本研究利用四軸微製造系統製作出高深寬比為3.347之結構。

關鍵字

雙光子光致聚合 ； 四軸微製造系統 ； 高深寬比

並列摘要

Two-photon polymerization is a novel microfabrication technology. In this technology, the structure is fabricated layer by layer and it can be made in any three-dimensional complex shape. However, the smallest forming unit in TPP is called voxel. In conventional three-axis micro-manufacturing system the micro-structure is distortion when voxel is vertically stacked layer by layer because the shape of voxel is ellipsoid. Therefore, this research proposed four-axis system instead three-axis one. The glass substrate can be rotated by rotating the 4th axis. So that the voxel can be stacked in different way which is compared with conventional three-axis micro-manufacturing system. This research was established the voxel database in the beginning. By Changing laser power and exposure time, making voxel array by using conventional three-axis micro-manufacturing system, and using the scanning electron microscope to measure the vertical and horizontal voxel size. Thus, the research was used four-axis micro-manufacturing systems to produce high aspect ratio structure array, and verified the feasibility of the four-axis system architecture. The experimental results showed the high aspect ratio structure can be made and the high aspect ratio is about 3.347 by using four-axis micro-manufacturing systems.

並列關鍵字

Two-photon Polymerization ； Four Axis Micro-manufacturing System ； High Aspect Ratio

參考文獻

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