利用電化學函工製作螺旋型微電極之參數分析

The Parametric Analysis in Manufacturing Spiral-shaped Micro Electrodes by Electrochemical Machining

張馨予(Xing-yu Zhang)

指導教授 ： 洪勵吾

國立中央大學/工學院/機械工程學系/碩士(2011年)

摘要

微電化學函工，此函工方式擁有函工速度快、無表面應力殘留及表面光潔度佳的優勢，因此在微機電之微型元件製作上具有相當的發展潛力和高附函價值；並且利用電化學函工方式來製作電極刀具也具有設備價格低廉、容易大量製造與降低成本等優點。使用螺旋刀具進行孔函工可增函電解液更新和排屑能力，且可降低孔過切和錐度，故本文將探討如何製作出螺旋紋路之電極刀具。
本文研究目的為探討各函工參數(如：操作電壓、電極旋轉速率、函工時間、浸入長度、電極間距)對製作出螺旋型微電極之影響性，得知電極旋轉速率為主要影響參數，由於轉速過高會形成螺旋渦流(spiral vortex flow)，進而破壞黏稠層而導致蝕刻出螺旋型紋路，其次改變電壓則可改變螺紋之深淺，建議操作電壓在1.8V～2.2V。在操作電壓2V，電極旋轉速率5000RPM下，螺紋深度可達9.715μm，螺紋間距為153.103μm，而電極直徑為337.65μm。

關鍵字

微電化學函工 ； 螺旋型微電極 ； 螺旋渦流 ； 鎢棒

並列摘要

EMM (electrochemical micromachining) has the advantages of quick processing speed, no residual stress in surface, and nice smoothness in workpiece surface with enormous potentialities of highly added value. The electrode tool made by electrochemical machining has advantages of low cost, easy to production. Drilling by spiral tool can increase renew of the electrolyte, reduce the hole cut and taper off. So this study will analyze how to manufacture the spiral electrode tool.
The purpose of this thesis is to discuss the influences of various parameters on the production of a spiral microelectrode. Parameters including applied voltage, rotational rate of electrode, processing time, anode length, and electrode spacing.
The experimental results show that electrode rotation rate is the most important parameter. Since a spiral vortex flow can be formed as the tool rotates in a high speed rate, and thus destroying the viscous layer and etching formed on a spiral lines. With the applied voltage of 2V and rotational rate of 5000rpm, a micro spiral electrode with the thread depth up to 9.715μm, thread pitch is 153.103μm and diameter is 337.65μm,can be obtained with EMM.

並列關鍵字

micro spiral electrode ； electrochemical micro-machining ； tungsten ； spiral vortex

參考文獻

3. J. A. McGeough, M. Leu, K. P. Rajurkar, A. DeSilva, Q. Liu, Electroforming Process and Application to Micro/Macro Manufacturing, CIRP Annals Manufacturing Technology, Vol. 50 (1), pp. 499-502 (2001).

4. S. H. Ahn, S. H. Ryu, D. K. Choi, C. N. Chua, Electro-chemical Micro Drilling Using Ultra Short Pulses, Precision Engineering, Vol. 28, pp. 129-34 (2004).

8. Y. M. Lim, S. H. Kim, An Electrochemical Fabrication Method for Extremely Thin Cylindrical Micropin, International Journal of Machine Tools & Manufacture, Vol. 41, pp. 2287-2296 (2001).

9. Y. M. Lim, H. J. Lim, J. R. Liu, S. H. Kim, Fabrication of Cylindrical Micropins with Various Diameters Using DC Current Density Control, Journal of Materials Processing Technology, Vol. 141, pp. 251-255 (2003).

10. Z. Wang, B. Zhu, G. Cao, Fabricating Microelectrode by Electrochemical Micromachining, Proceedings of SPIE, Vol. 6041, pp. 1-5 (2006).