電化學製作針錐微電極之製程研究與分析

The Analysis and Investigation on the Manufacturing Pin-shaped Micro Electrodes by Electrochemical Machining

賴鍵毅(Chien-Yi Lai)

指導教授 ： 洪勵吾

國立中央大學/工學院/機械工程學系/碩士(2011年)

摘要

微機電是目前科技界在未來最具有發展潛力的研究領域之一，其加工方法之研究和精進是所必需的。電化學微細加工(EMM)之優點為可以加工任何金屬材料，且不受硬度與強度的影響和加工過程刀具電極不損耗，加工速度快，應力也不會殘留在工件表面，加工的重現性也較放電加工高。
本文研究目的為利用電化學將直徑200 μm的鎢棒製作成針錐狀電極得到錐度極小及深寬比大的針錐狀電極,分別使用單一因子法與田口法來分析加工參數(如：操作電壓、電解液濃度、陽極長度、拉提速率、陰極面積、電極旋轉速率)之影響性。
實驗結果顯示當操作電壓和電解液濃度在加工電流達到極限電流前改變時會影響加工表面精度，而陽極浸入長度和拉提速率之搭配對於加工微電極成型之錐度與深寬比有重要的影響性，電極旋轉速率在適當速度內可使雜質離開加工表面提升表面精度，本文在參數範圍內找出一組較合宜之參數。

關鍵字

動力拉提法 ； 針錐 ； 電化學微細加工 ； 微電極

並列摘要

MEMS is one of the most important technology in the future, and it is important and necessary to advance this manufacture methods. Electrochemical micro-machining (EMM) has several advantages. Any metal material regardless of its hardness can be machined by EMM. The cathode tool would not be wearied the machining process, and work piece after machining will not have any residual stress remained on its surface. The machining reproducibility of EMM is higher than that of electro discharge machining.
The purpose of this thesis is to use electrochemical machining to manufacture a tungsten rod with diameter of 200 μm to a conical-shaped electrode. The resulting cone angle is extremely tiny with high aspect ratio. Both Taguchi statistical method of quality-engineering and the single factor method are used to analyze the influences of working parameters, such as applied voltage, electrolyte concentration, anode length, draw up rate, cathode area, and rotational rate of electrode, on the conical-shaped electrode.
The applied voltage and electrolyte concentration are found to significantly affect the electrode fabrication when the current is smaller than the current limit. Anode length and drawing up rate have large influence on the aspect ratio and the cone angle. Rotational rate of electrode can increase the machining precision. The best combination of parameters are simultaneously acquired from the research.

並列關鍵字

electrochemical micro-machining ； micro electrode ； tungsten ； conical-shaped ； dynamic drawing

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