本篇論文主要在研究離子性高分子合金複合材料(Ionic Polymer Metel Composites,IPMC)的製程與應用,透過元件的致動,進行的感測方面的應用開發。 在製程方面,文中對於IPMC元件從模仁的黃光微影製程到元件電極的製作方式做完整的介紹。在IPMC致動器完成後,利用所架設的實驗平台,針對元件進行作動及電流變化等數據分析。 在元件感測的應用方面,我們利用市售的壓電片PZT(Lead Zirconate Titanated) 和自製的應變規元件與本文的IPMC元件做結合,PZT方面利用嵌入的方式,利用元件在夾取物體時,針對夾取的物體作超音波成像,並從成像後的灰階圖,對物體作非破壞性的檢測。另外,經過多組數據量測,並針對應變規元件進行校正,我們達到設計應變規的初始目的,即透過觀察應變規的輸出電壓值,得到IPMC元件相對應的致動位移量。 最後,利用在IPMC致動器裡嵌入吸水性材料的方式,解決IPMC 致動器的水份散失問題,並經由重量消耗和元件位移量比較,驗證補水裝置的成效。
The main goal of this dissertation is to study the manufacturing processes and application of Ionic polymer metal composites (IPMC as the abbreviation), as well as the sensing mechanism through the IPMC`s dynamic deformation. Firstly, we have demonstrated the fabrication processes from the photolithography process of mold to the production of IPMC’s electrode. Then, using the self-made experimental platform, we focus on the analysis of the actuation and current changes of the fabricated devices. Secondly, we combined the PZT element and the self-made strain gage with IPMC component. PZT was embedded in the component and it can made ultrasound imaging for the gripped object when the IPMC component gripped it, then through the grayscale image we can do non-destructive testing on the objects. Furthermore, by means of multiple sets of data and correction of strain gage , it could achieve our origin goal which the amount of displacement of the IPMC component will be obtained through the observation of the output voltages of strain gage, Eventually, we embedded the absorbent material in an IPMC actuator so as to solve the problem of water lost in the IPMC actuator .We prove the effectiveness of water supply system by the comparison of weight of consumption and the amount of displacement of the IPMC component.