滾輪式微接觸印刷之上墨技術研發

Research and Development of the Inking Method of Roller-Based Micro-Contact Printing

魏文煥(Wei, Wenhuan)

指導教授 ： 鄭榮偉

國立中正大學/工學院/機械工程學系/碩士(2013年)

摘要

本實驗室致力於軟性電子製程開發，其重點在於有機薄膜的圖案化技術，而本技術的關鍵點在於如何能夠在大氣下，達到均勻的有機薄膜圖案。目前本實驗室已開發出使用溶劑預潤濕之創新技術，成功達成10微米、且表面平坦的高分子薄膜圖案化能力。
但此技術只以手動方式驗證過，為了瞭解未來自動化製程的可行性，本文將對於適用在自動化之上墨技術進行探討，並配合本實驗室開發之創新自調式刮刀塗佈技術在PDMS矽膠達成大面積塗佈。針對在PDMS矽膠達成大面積塗佈P3HT所產生的問題，以實作了解其發生原因並且改善。最後結合溶劑預潤濕以及自調式刮刀塗佈技術，利用伺服馬達控制滾輪及移動平台達成自動化印刷大面積的P3HT圖案化薄膜，其解析度為70微米、粗糙度為4.5奈米。

關鍵字

滾輪式 ； 上墨技術 ； 微接觸印刷 ； 圖案化

並列摘要

Our group has devoted to flexible electronics fabrication for a long time and we focus on the organic patterning thin film. The key point of this technology is how to achieve a uniform organic patterning thin film in the room temperature. We have developed Innovative Micro-Contact Printing process with solvent pre-wetting, successfully achieved the flat surface of the polymer patterning thin film and the resolution is 10 μm.
However, the technique only manually verified, in order to understand the feasibility of automated processes, this thesis will decide the inking method for the automated printing. And we try to achieve a large area coating on PDMS by self-adjusting blade coating technology. For the problems of blade coating P3HT on PDMS, we understand the reasons for its occurrences by experiments and improve it. Finally, using roller and carrier controlled by servo motor to print a large area P3HT patterning thin film and the resolution is 70 μm, the surface roughness is 4.5 nm.

並列關鍵字

roller-based ； inking method ； micro-contact printing ； patterning

參考文獻

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[7] H. A. Biebuyck, N. B. Larsen, E. Delamarche, and B. Michel, “Lithography beyond light: Microcontact printing with monolayer resists,” IBM J. Res. Dev., vol. 41, pp. 159-170, 1997.