結合自調式刮刀塗佈與掀離圖案法之捲對捲低極性高分子薄膜圖案化技術之研發

Research and Development of a Roll-to-Roll Approach to Thin-Film Patterning of Low-Polarity Polymers by Integration of the Self-Adjusting Blade Coating and Lift-Off Patterning Technique

余東翰(TUNG-HAN YU)

指導教授 ： 鄭榮偉

國立中正大學/工學院/機械工程學系/碩士(2013年)

摘要

本文是致力於軟性電子製程的發展。其重點是在軟性基板上將高分子材料塗佈出大面積的薄膜，而成功塗佈之環境條件是在低溫與高速度的情況下。本研究目標希望藉由捲對捲製程達到可商業化的量產。
本文使用不同的高分子材料塗佈於軟性基板。初步實驗以手動的方式進行，然後將產生的問題進行探討。為了要解決關於殘留物的問題，提出了在基板上塗佈一層名為HTL的高分子材料。最後在捲對捲機器上將自調式刮刀塗佈法結合圖案掀離法，達成大面積薄膜圖案化的目的。

關鍵字

掀離技術 ； 刮刀塗佈

並列摘要

This paper is devoted to development of flexible electrical. The major contribution from this paper is coating the thin films of large scale polymer materials on flexible substrate, and the environmental condition of successful coating is low temperature, high speed. The objective of research is hoping to achieve commercial production by R2R process.
This paper is about coating thin films by using different polymer materials on the flexible substrate. The initial experiment is began by hand-powered method, then the generated problems are discussed. To solve these problems about remains, I propose solution about using a HTL (hole transport layer) which is polymer materials to coat thin films on the substrate. Finally, I integrate self-adjusted blade coating with lift-off coating in the R2R machine to achieve the objective of patterned thin films of large scale.

並列關鍵字

Blade coating ； Lift off

參考文獻

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