聲波懸浮系統的建立及創新應用之研究

The Research of Establishment and Innovative Applications of Acoustic Levitation System

陳冠勳(Kuan-Hsun Chen)

指導教授 ： 王欽戊

國立中正大學/工學院/機電光工程研究所/碩士(2015年)

摘要

聲波懸浮技術近年來被廣泛地應用，聲波懸浮技術可以不藉由接觸的方式來夾持微小的物體，包含固體、及液體都可以被懸浮。此外，被懸浮的物體不受物理特性之限制，故聲波懸浮的應用是相當地廣泛。
本研究利用超聲波來建置聲波懸浮系統，透過超聲波換能器與反射器之間產生駐波來懸浮物體。其中，超聲波換能器與反射器的距離須符合聲波的半波長，如此才能產生駐波將物體懸浮。本研究藉由使用不同的反射端(平面、曲面)來使聲波懸浮系統能有更佳的懸浮力，並且設計一裝置使被懸浮的物體可以達到移動、以及旋轉等動作。

關鍵字

駐波 ； 非接觸技術 ； 聲波懸浮 ； 換能器

並列摘要

Acoustic levitation technology has been widely used in recent years. It can be used to levitate small objects, including solids and liquids, without any physical connection. The physical characteristics of the levitated objects are unrestricted. Hence, the potential applications of acoustic levitation technology are quite extensive.
In this research, an acoustic levitation system is constructed using ultrasound. Standing waves for levitating objects are produced between an ultrasonic transducer and a reflector. In order to produce standing waves that can levitate the objects, the distance between the ultrasonic transducer and the reflector must equal half the wavelength of the acoustic waves. In this research, we use different reflectors (flat and concave surfaces) to provide a stronger levitation force and design an acoustic levitation system that can levitate objects through several movement modes, such as transportation and rotation.

並列關鍵字

Standing waves ； Non-contact technology ； Acoustic levitation ； Transducer

參考文獻

[1]. Y. Hashimoto, Y. Koike, and S. Ueha, “Noncontact suspending and transporting planar objects by using acoustic levitation”, IEEJ Transactions on Industry Applications, Vol. 117, No. 11, pp. 1406-1407, (1997).

[2]. G. Reinhart, J. Hoeppner, and J. Zimmermann, “Non-Contact Wafer Handling Using High-Intensity Ultrasonics”, Advanced Semiconductor Manufacturing Conference, Munich, pp. 139-140, (2001).

[3]. J. Li, P. Liu, H. Ding, and C. Wenwu, “Design optimization and experimental study of acoustic transducer in Near Field Acoustic Levitation”, Proceedings of IEEE International Conference on Robotics and Automation (ICRA), Shanghai, pp. 4353-4358, (2011).

[4]. H.M. Hertz, “Standing‐wave acoustic trap for nonintrusive positioning of microparticles”, Journal of Applied Physics, Vol. 78, pp. 4845-4849, (1995).

[5]. Y. Koike, S. Ueha, A. Okonogi, T. Amano, and K. Nakamura, “Suspension mechanism in near field acoustic levitation phenomenon”, Ultrasonics Symposium, Vol. 1, pp. 671-674, (2000).