平面式光波導感測器研究

Fabrication of Planar Polymer Waveguide for Sensing

施惠瑄(Huei-Syuan Shih)

指導教授 ： 周禮君

國立中正大學/理學院/化學暨生物化學系/碩士(2015年)

摘要

本研究以同材料不同折射率之聚二甲基矽氧烷(Polydimethylsiloxane, PDMS)進行製作平面式光波導晶片(planar polymer sensor , PW sensor)。運用矽晶圓片製作晶片端面，並對平面式光波導晶片進行導光能力測試，對晶片端面進行導光鑑定，測量晶片之光訊號傳輸衰減值(Attenuation loss)以及介面衰減值(Coupling loss)並計算出路徑衰減值(Propagation loss, Path loss)，以及針對光波導晶片之製作流程參數最佳化(core層大小、PDMS合成比例選擇、晶片上蓋材料選擇)，經由最佳化結果為，光波導晶片Core層大小為2 mm，PDMS core 層比例為 10:1，PDMS cladding 層比例為20:1，選擇壓克力材料(PMMA)製作上蓋。最佳化之光波導晶片測定單位長度之Attenuation loss值為0.209 dB/cm，Coupling loss 值為0.198 dB。完成平面式光波導晶片後，再透過表面官能化，進行金奈米粒子修飾。將平面式光波導晶片，搭配具有微流道之壓克力上蓋，並以其晶片為核心檢測元件，研發一套平面式光波導即時檢測系統，進行折射率感測研究，本研究平面式光波導即時檢測系統之感測解析度(sensor resolution, SR) 為2.2 × 10-5 RIU，感測靈敏度(sensor sensitivity)可達到2.40 RIU-1。未來期望開發高靈敏度的平面式光波導感測器。

關鍵字: 平面光波導、聚二甲基矽氧烷、光波導感測器、
光訊號傳輸衰減值

關鍵字

波導感測器 ； 聚二甲基矽氧烷 ； 平面光波導 ； 光訊號傳輸衰減值

並列摘要

In this research, a polymer waveguide based on PDMS core and cladding with different refractive indexes has been made as a sensor. To fabricate smooth and flat end faces of the PDMS waveguide, silicon wafers were applied in the process. Then attenuation loss, propagation loss, and coupling loss were measured to characterize the PDMS waveguide. In order to optimize the PDMS waveguide, the effects due to the size and refractive index of the core were investigated. The optimized parameters to prepare the PDMS waveguide are core size of 2 mm and the use of reagent mixing ratios of 10:1 and 20:1 to prepare the core and cladding, respectively. In addition, poly(methyl methacrylate)(PMMA) was chosen as the material for the top plate of the PDMS waveguide chip. By this approach, the optimized Attenuation loss is 0.209 dB/cm and the coupling loss is 0.198 dB.
To test this polymer waveguide sensing platform, we modified gold nanoparticles (AuNPs) on the PDMS waveguide core surface. This waveguide can increase the effective absorbance of gold nanoparticle (AuNP) layer on the core surface by multiple total internal reflections. By this approach, the planar polymer waveguide sensor has achieved a refractive index sensor resolution of 2.2 × 10-5 RIU and a sensor sensitivity of 2.40 RIU-1.
Key word : Planar waveguide,PDMS, Sensor, Propagation loss,
Coupling loss

並列關鍵字

Propagation loss ； Sensor ； PDMS ； Planar waveguide ； Coupling loss

參考文獻

[2] Z. Cai, W. Qiu, G. Shao and W. Wang, Sensors and Actuators A: Physical 2013, 204, 44-47.

[4] K. Kivirand, M. Kagan and T. Rinken, Calibrating Biosensors in Flow-Through Set-Ups: Studies with Glucose Optrodes, INTECH Open Access Publisher, 2013.

[5] X. Wu, J. Zhang, J. Chen, C. Zhao and Q. Gong, Optics letters 2009, 34, 392-394.

[6] Y.-Y. Yu, S.-S. Chang, C.-L. Lee and C. C. Wang, The Journal of Physical Chemistry B 1997, 101, 6661-6664.

[16] https://physick.wikispaces.com/Total+Internal+Reflection, wikispaces.