表面聲波感測器偵測ppb等級一氧化氮氣體之室溫感測特性之研究

Room Temperature Detection Properties of ppb-level NO Gas based on Surface Acoustic Wave Sensor

蘇健銘(Jian-Ming Su)

指導教授 ： 沈季燕

義守大學/電機資訊學院/電機工程學系/碩士(2014年)

https://doi.org/10.6343/ISU.2014.00049

摘要

早期的呼吸疾病可使用醫療儀器系統來進行檢測診斷，不僅耗時且程序複雜。因此，本論文使用塗佈聚苯胺/氧化鎢複合薄膜的表面聲波元件為感測器，藉由添加金屬離子混合物於感測層來以增強聚苯胺/氧化鎢複合薄膜對一氧化氮的感測靈敏度，研製可於室溫下操作並且快速偵測ppb濃度之一氧化氮氣體感測器。本論文將在乾燥N2環境下，偵測濃度1~200 ppb的一氧化氮並分析靈敏性、再現性、回復性、穩定性及選擇性等感測器特性。本論文研製的感測器對偵測ppb濃度的NO除具有線性靈敏度外，且呈現良好的回復性和再現性；於27日後，長期穩定性可達90%。此外，以氨氣、二氧化碳及氧氣為干擾氣體時，此感測器亦具有極佳的選擇性。最後，為了實踐在空氣中偵測一氧化氮，藉由增加感測膜中金屬離子添加量，達到增加表面聲波感測器在空氣中對一氧化氮的檢測靈敏度。

關鍵字

表面聲波 ； 聚苯胺 ； 三氧化鎢 ； 一氧化氮

並列摘要

It could use a complex medical system to detect respiratory diseases in the early stage, but it is time consuming. In this work, the surface acoustic wave (SAW) devices coated with the polyaniline/tungsten trioxide (PANI/ WO3) composite thin film by adding a mixture of metal ions were developed to detect nitrogen oxide (NO) in the ppb range at room temperature. This developed SAW sensor could sensitively detect nitric oxide in a range of 1-200 ppb in dry nitrogen. The sensing characteristics, including sensitivity, repeatability, reversibility, stability and selectivity were studied. Results of detecting ppb-level NO showed a good linear sensitivity. This developed sensor exhibited good reversibility and repeatability. After 27 days, the long-stability of the SAW sensor was up to 90%. The interference effects from ammonia, carbon dioxide and oxygen were also investigated in this work, and it is shown that the interferences could be neglected. In order to detect ppb-level NO in dry air, the concentration of the metal ions added into PANI/ WO3 composite thin film was increased to improve the sensitivity of the SAW sensor.

並列關鍵字

Surface acoustic wave (SAW) ； Polyaniline ； Tungsten trioxide ； Nitric oxide

參考文獻

[1] L. Rayleigh, "On wave propagated along the plane surface of an elastic solid," proc.London Math.Soc., vol. 17, pp. 4-11, 1885.

[2] R.M.White and F.W.Voltmer, "Direct piezoelectric coupling to surface elastic wave," Aool.Phys.Lett., vol. 7, pp. 314-316, 1965.

[3] G.Sauerbrey, "The use of quartz crystal oscillators for weighing thin layers and for microweighing," Z.Phys, vol. 155, pp. 206-222, 1959.

[4] W.H.King, "Piezoelectric Sorption Detector," Analytical Chemistry, vol. 36, pp. 1735-1739, 1964.

[5] M. S. Nieuwenhuizen and A. W. Barendsz, "Processes involved at the chemical interface of a saw chemosensor," Sensors and Actuators, vol. 11, pp. 45-62, 1987.