高靈敏度表面聲波一氧化氮感測元件之研發

High Sensitivity Nitric Oxide Sensors Using Surface Acoustic Wave Devices

邱靖傑(Jing-Jay Chiu)

指導教授 ： 沈季燕

義守大學/電機資訊學院/電機工程學系/碩士(2019年)

摘要

氣喘是現今常見的氣道慢性炎症疾病，檢測呼吸疾病迄今都需要藉由繁複耗時的醫療儀器系統來進行肺功能檢查。因此，本論文使用具還原氧化石墨烯/聚吡咯/氧化鎢(rGO/PPy/WO3)奈米複合薄膜的表面聲波元件(Surface Acoustic Wave)為感測器，藉由氧化鎢的多孔性結構，與還原氧化石墨烯/聚吡咯在室溫的靈敏度與選擇性，研製可於室溫下操作並且快速偵測ppb等級的一氧化氮氣體感測器。本論文研製的表面聲波感測器在乾燥空氣下，偵測濃度1-110ppb的一氧化氮顯示的靈敏度為11 ppb/Hz，響應時間和恢復時間都在2分鐘以內，最小可偵測濃度估計約為0.3 ppb，並展現再現性、回復性、長期穩定性等良好的感測特性。此外，以二氧化氮、氨氣、二氧化碳為干擾性氣體時，此感測器亦具有極佳的選擇性。

關鍵字

表面聲波 ； 一氧化氮 ； 石墨烯 ； 聚吡咯 ； 氧化鎢

並列摘要

Asthma is a common chronic inflammatory disease in the respiratory tract. Detection of respiratory diseases often uses the post-bronchodilator test, which requires complex medical instrument, and the detection process is usually time-consuming. Therefore, this study used a surface acoustic wave (SAW) device containing graphene/polypyrrole/tungsten trioxide (rGO/PPy/WO3) nanocomposite thin films as the basis to develop a nitric oxide sensor. Through the porous structure of WO3 and the sensitivity and selectivity of rGO/PPy, the sensor could rapidly detect nitric oxide in the ppb level at room temperature. The developed sensor detected nitric oxide of 1–110 ppb concentration in dry air with a sensitivity of 11 ppb/Hz. Both the response time and recovery time were shorter than 2 minutes. The minimum detectable concentration was approximately 0.3 ppb. The developed sensor demonstrated favorable sensor characteristics such as repeatability, reversibility, and long-term stability. Moreover, the sensor exhibited excellent selectivity when nitrogen dioxide, ammonia, and carbon dioxide were used as interfering gases.

並列關鍵字

surface acoustic wave ； nitric oxide ； graphene ； polypyrrole ； tungsten oxide

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