TFT-LCD產業揮發性有機物(VOCs)空氣污染防制設備 旋轉蓄熱式燃燒爐(RRTO)效能差異研究

Removal Performance Investigation Of Volatile Organic Compounds From TFT-LCD Industry By Using Rotary Regenerative Thermal Oxidizer

錢一心(Yi-Hsin Chien)

指導教授 ： 羅煌木

朝陽科技大學/理工學院/環境工程與管理系/碩士(2010年)

摘要

本論文探討薄膜電晶體液晶顯示器(Thin Film Transistor Liquid Crystal Display, TFT-LCD)產業五代廠實廠所設置之兩套蜂巢式沸石轉輪“旋轉式蓄熱式燃燒爐(RRTO)”處理設備，評估其吸附濃縮焚化系統揮發性有機物(Volatile Organic Compounds, VOCs)之效能。旋轉蓄熱式燃燒爐(Rotary Regenerative Thermal Oxidizer)之爐溫設定850℃，蜂巢式沸石轉輪轉速設定2.5轉/小時，系統風量1,375 m3/min，脫附風量91 m3/min，脫附溫度205℃，轉輪濃縮比為1:15。VOCs以霍式紅外光譜儀(Fourier Transform Infrared spectrometry, FTIR)及氣體層析-火焰離子偵測器(GC-FID)加以分析，檢測項目有丙二醇單甲基醚酯(PGMEA)，丙二醇單甲基醚(PGME)，乙酸丁酯 (nBA)與異丙醇(IPA)。丙二醇單甲基醚酯(PGMEA)，丙二醇單甲基醚(PGME)，乙酸丁酯 (nBA)與異丙醇(IPA)分析結果，其濃度可由3.3，118，75.4與431 mg/Nm3降為ND，1.85，1.15與4.16 mg/Nm3，其去除率分別可達100，98.43，98.47與99.03%，顯示旋轉式蓄熱式燃燒爐其可有效增進揮發性有機物之去除。

關鍵字

揮發性有機物 ； 薄膜電晶體液晶顯示器 ； 霍式紅外光譜儀 ； 旋轉蓄熱式燃燒爐

並列摘要

This paper aims at investigating the removal efficiency of volatile organic compounds (VOCs) produced from Thin Film Transistor Liquid Crystal Display (TFT-LCD) by using Rotary Regenerative Thermal Oxidizer (RRTO). Temperature in the furnace of RRTO was maintained at 850℃. Rotary speed of RRTO was operated in 2.5 revolution/hr. Inlet gas was 1,3753 m3/min and adsorption gas was 91 m3/min. Rotary concentrated ratio was 1/15. Adsorption temperature was set at 205℃. VOCs such as PGMEA, PGME, nBA and IPA were analyzed with FTIR and GC-FID. PGMEA, PGME, nBA and IPA were reduced from 3.3, 118, 75.4 and 431 mg/Nm3 to ND, 1.85, 1.15 and 4.16 mg/Nm3 respectively. Removal efficiency of PGMEA, PGME, nBA and IPA were found to be 100, 98.43, 98.47 and 99.03% respectively. Results implied that RRTO could improve the removal of VOCs efficiently.

並列關鍵字

FTIR ； RRTO ； TFT-LCD ； VOCs

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