- 學位論文
CO2流量及偏壓參數對AISI 304 不銹鋼電弧披覆Cr-C-O 複合膜特性之影響
CO2 Flow Rate and Bias Effects on Characteristics of AISI 304 Stainless Steel Arc-deposited Cr-C-O Composite Coatings
摘要
本研究利用陰極真空電弧 (Cathodic vacuum arc, CVA) 沉積系統，配合使用CO2 反應氣體與Cr 靶來沉積Cr-C-O 複合薄膜於AISI 304 不銹鋼基材上，實驗中變化基材之偏壓與CO2 流量做為製程參數，然後進一步分析各鍍膜結構、特性(包括粗糙度、化學組成、附著性)以及進行AISI 304 不銹鋼鍍膜前後之極化腐蝕、浸泡腐蝕、磨耗及沖蝕試驗，以探討 各組參數下對於AISI 304 不銹鋼表面性質之影響。 實驗結果顯示，經過表面披覆 Cr-C-O 複合薄膜，可以有效地提升AISI 304 不銹鋼的耐腐蝕及耐磨耗等性質；在耐蝕性方面，由極化及浸泡結果發現，披覆膜層之基材，耐腐蝕性質皆能夠獲得提升，尤其是在40sccm 施以-150V 所沉積之膜層提升效果最為優異；在耐磨耗及耐沖蝕方面，由於在40sccm‐150V 之參數下所沉積之薄膜具有較高H/E 值，且附著性較好，因此有最佳的耐磨耗及耐沖蝕性。整體來說，經過表面披覆Cr-C-O 複合薄膜，可以有效提升AISI 304 不銹鋼各方面之特性。
並列摘要
In this study, the Cr-C-O composite coatings were synthesized on AISI 304 stainless steel substrate by cathodic vacuum arc (CVA) deposition system using CO2 reactive gas and Chromium (99%) target. In the process, we try to vary the CO2 flow rate and the bias as the coating parameters, and the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, polarization tests, immersion tests, wear tests, and erosion tests were also performed for exploring the effects of bias and CO2 flow rate on the coated AISI 304 stainless steel. The experiment results showed that the Cr-C-O composite coatings can improve the properties of AISI 304 stainless steel, such as wear resistance and corrosion resistance. In the aspect of corrosion behaviors, the polarization test and immersion test showed that the coatings have the best quality at 40sccm with -150V. At the same parameter, due to a higher value of H/E and the best adhesion, it also has a well performance in wear test and wet erosion test. In conclusions, the Cr-C-O coated specimens can improve the properties of AISI 304 stainless steel.