近十年來,由於微機電技術愈來愈成熟,應用面也隨之愈來愈廣泛,如感測元件、制動器、生物檢測等各方面皆有出色的研究發展。隨著生活品質的提升,人類在醫療及保建方面的要求也隨之提高,因此微機電技術應用於生物技術也隨之興起,過去數年來如複製晶片、檢測晶片、分離晶片等相當多的文章發表。 本論文針對生物技術中微小粒子分離進行研究,進行設計與製作一具有可快速分離微小粒子元件,並結合石英晶體微天平使其能快速檢測分離效果。在分離微小粒子研究中,本文提出以3D式介電泳(Dielectrophoresis)為分離方式,讓檢體流經電極表面後能快速進行分離。研究過程中利用CFD -RC軟體進行3D電場中電場分佈的模擬。利用熱壓崁入技術,將電極崁於流道內。 在石英晶體微天平研究方面,進行設計與製作出一量測置具。以傳統CNC加工製作出置具模具後,再以熱壓成型技術完成量測置具及流道分佈。本研究提出以石英晶體微天平作為介電泳電極之一,將介電泳電極與石英晶體微天平整合於置具中以完成分離粒子。檢測方面,以石英晶體微天平作為檢測平臺,以驗證分離效率。
In recent years, MEMS technology have been developed and applied in various kinds of fields, such as, optics, power, sensor, bioengineer and etc. However, with the improvement of quality of the life, people want to have better medical treatment. MEMS technology is applied by biotechnology such as PCR chip, detection chip, separated chip and etc. This research is focus on biotechnology research in the separation of nano particles, we use the MEMS processing technology to design and produce a fast separation of nanol particles with the components, combined with quartz crystal microbalance to enable rapid detection of separation. The separation of nano particles in the study, this paper proposes a 3D DEP (Dielectrophoretic) for the separation, which allows flow through the electrode surface after the samples were separated quickly. Course of the study using CFD ACE + software for 3D simulation of the electric field in the electric field distribution. Embedded technology by hot-embedding , the electrode embedded in the flow channel. In the quartz crystal microbalance study, to design and produce a measurement of the vehicle. CNC machining to produce the traditional mold carrier, and then to measure the compression molding technology to complete the vehicle and the flow distribution. The quartz crystal microbalance proposed as one of the DEP electrodes, the DEP and the quartz crystal microbalance electrodes integrated into the vehicle in order to complete the separation of particles. Detection, the quartz crystal microbalance as a test platform to verify the separation efficiency.