退火處理溫度對AISI 316L不銹鋼披覆TiN薄膜特性影響之研究

Study on Effect of Annealing Temperature on Characteristics of AISI 316L Stainless Steel Arc-coated TiN Films

林孟儒(Meng-Ru Lin)

指導教授 ： 許正勳

大同大學/工程學院/材料工程學系所/碩士(2012年)

摘要

本研究利用陰極真空電弧(Cathodic arc deposition, CVD) 沉積系統，配合使用N2反應氣體與Ti靶來沉積TiN薄膜於AISI 316L不銹鋼基材上。實驗後使用退火溫度做為實驗參數，然後進一步分析各鍍膜結構、特性(包括粗糙度、化學組成、附著性)以及進行TiN鍍膜退火前後之極化腐蝕、浸泡腐蝕、及磨耗試驗，以探討各組參數下對於AISI 316L不銹鋼表面性質之影響。
實驗結果顯示，經過表面披覆退火TiN薄膜，可以有效地提升AISI 316L不銹鋼的耐腐蝕及耐磨耗等性質；在耐蝕性方面，由極化及浸泡結果發現，披覆膜層之基材，耐腐蝕性質皆能夠獲得提升，尤其是退火溫度500℃之TiN鍍膜所提升效果最為優異；在耐磨耗方面，由於在退火溫度500℃之TiN鍍膜之參數下所沉積之薄膜具有較高H/E值，且附著性較好，因此有最佳的耐磨耗性。整體來說，AISI 316L不銹鋼經過表面披覆退火後之TiN薄膜，可以有效提升未退火之TiN薄膜各方面之特性。

關鍵字

TiN薄膜 ； N2 ； AISI 316L不銹鋼 ； 陰極真空電弧沉積 ； 退火 ； 耐耗 ； 耐腐蝕

並列摘要

In this study, the TiN coatings were synthesized on AISI 316L stainless steel substrate by cathodic arc deposition (CAD) system using N2 reactive gas and Titanium (99.9%) target. In the process, we try to vary the annealing temperature as the coating parameters, and the coating morphologies and properties such as roughness, chemical composition, structure, and adhesion were all analyzed. Moreover, polarization tests, immersion tests, wear tests, and were also performed for exploring the annealing temperatures on the coated AISI 316L stainless steel.
The experiment results showed that the TiN coatings can improve the properties of AISI 316L stainless steel, such as wear resistance and corrosion resistance. In the aspect of corrosion behaviors, the polarization test and immersion test showed that the coatings have the best quality at annealing temperature at 500℃. In wear test, TiN coatings have a lowest friction coefficient (0.252) when the annealing temperature at 500℃ to get the highest value of H/E and adhesion. In conclusions, after annealing the TiN coated specimens can improve the properties of AISI 316L stainless steel before annealing.

並列關鍵字

TiN coatings ； N2 ； AISI 316L stainless steel ； Cathodic arc deposition ； Annealing ； Wear resistance ； Corrosion resistance

參考文獻

coatings for lubrication reduction in metal forming”, Surface and

Gudmundsson, “Ionized physical vapor deposition (IPVD): A review

of technology and applications”, Thin Solid Films 513 (2006),

“Influence of CrxNy coatings deposited by magnetron sputtering on

nanostructuration of PVD hard TiN-based films on the durability of