- 學位論文
不同混合氫氣乙炔比例對電漿輔助化學氣相沉積類鑽碳薄膜之機械光學與生物相容性影響
MECHANICAL OPTICAL AND BIOCOMPATIBLE PROPERTIES OF DIAMOND-LIKE CARBON FILMS BY PLASMA ENHANCED CHEMICAL VAPOR DESOPITION USING DIFFERENT ACETYLENE HYDROGEN MIXING RATIO
摘要
本實驗以射頻電漿輔助化學氣相沉積法沉積類鑽碳膜，並於相同的沉積時間內，改變乙炔與氫氣的比例，利用表面輪廓儀量測薄膜厚度與殘留內應力、拉曼光譜儀量測薄膜的微結構、原子力顯微鏡量測薄膜的表面粗糙度、光譜儀與橢圓儀測量薄膜反射率、折射率及消光係數、X光電子能譜儀取得類鑽碳膜之sp3/sp2值與推算含氫量、水接觸角推算薄膜表面能、奈米壓痕儀測量薄膜硬度與楊氏係數。此外，在生物相容性的部分，經由不同乙炔與氫氣比例沉積的類鑽碳膜，分別將人體ECV304細胞培養於薄膜上48小時及72小時，最後做細胞計量的檢測。 實驗結果顯示，當氫氣的比例越高時，ID/IG值會呈現正比增加，即sp2結構相對於sp3結構比例越大，顯示薄膜的結構有趨向石墨化的情況。而在機械性質，硬度與楊氏係數在乙炔與氫氣比為9:1至6:4的部分，隨著氫氣含量的增加，薄膜硬度與楊氏係數皆上升；6:4至4:6部分，硬度與楊氏係數卻是下降的情況，推測薄膜表面已有脫膜的情況發生。另外，在殘留內應力的部分，乙炔與氫氣比為9:1到4:6的過程中，內應力從為1.122 GPa增大到1.537 GPa。在光學方面，六組比例沉積之類鑽碳膜的反射率值大約都在13.5-16%左右，且反射率有隨著含氫量增大的趨勢，從13.55%到15.75%；折射率大約是在2.0-2.18左右；消光係數則是介於0.14-0.165之間。在生物相容性部份，細胞培養數量顯示，ECV304細胞培養48小時，隨著氫氣比例的增加，細胞數量有稍微變多的趨勢;在細胞培養72小時的細胞計數中可發現，除了乙炔氫氣比為9:1、8:2、6:4外，其他三組的細胞附著量都是呈現減少的趨勢。
並列摘要
The DLC films were deposited on silicon substrate using different acetylene and hydrogen mixing ratio by RF plasma enhanced chemical vapor deposition. The thickness and residual internal stress of the films were measured by surface profiler. The micro-structure of the films were examined by Raman spectroscopy. The surface roughness of the films were characterized by atomic force microscopy. The reflectivity , refractive index and extinction coefficient of the films were examined by MProbe system and ellipsometer. The sp3/sp2 value and hydrogen content of the films were measured by X photoelectron spectrometer. The contact angle of the films were calculated by contact angle meter and we can calculate surface energy later. The hardness and Young’s modulus of the films were analyzed by nano-indentation. Finally, we cultured human body ECV301 cells on the silicon substrates and evaluated the cell number for 48 and 72 hours. The Raman results indicate that sp2 proportion in DLC films increases when H2/(C2H2+H2) ratio increases. It shows that the structure of the film tends graphitization. And the experimental results show hardness and Young's modulus increase with H2/(C2H2+H2) ratio from 0.9 to 0.6, but decrease from 0.6 to 0.4. We think that the film surface has been stripping occurs. In addition, with the reduction of H2/(C2H2+H2) ratio, the residual internal stress gradually increases from 1.122 Gpa to 1.537 GPa. In optics, the reflectance value of different acetylene and hydrogen mixing ratios ratio are about 13.5-16 %. And the values of the refractive index are 2.0-2.18 around and the values of the extinction coefficient is between 0.14-0.165. In the biocompatibility experiment, the ECV304 number that were cultured for 48 hours becomes slightly more trends. And we can found in the cell count of 72 hours that in addition to H2/(C2H2+H2) ratio of 0.9, 0.8 and 0.6, the cell adhesion amount of the other three groups are showing a decreasing trend.
參考文獻
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