A theoretical study of aerosol particles deposition onto a flat plate affected by thermophoresis and electrophoresis is reported. Similarity analysis is used to transform the governing equations for mass, momentum and concentration into a system of ordinary differential equations. Through numerical integration of the equation for particle concentration, concentration profiles and deposition rates are obtained. The mechanism for particle deposition includes Brownian diffusion, convection, thermophoresis and electrophoresis. The flow is considered with suction and blowing effects. The analytical results compared with the data of simple-addition method are also examined.