新穎式之高填充率石英陀螺儀

A Novel Quartz Gyroscope with High Filling Factor

許駿友(Chun-Yu Hsu) ； 沈志雄(Chih-Hsiung Shen) ； 陳淑容(Shu-Jung Chen)

《中華民國振動與噪音工程學會論文集》 2014 (2014/06) Pp. 189-193

摘要

有別於傳統的CMOS-MEMS製程之加速計與陀螺儀等慣性感測晶片，石英微機電（QMEMS）有著卓越的材料機械特性，更為適合應用於精確計時，特別是慣性感測器。不同於傳統石英陀螺儀，我們提出新穎式石英陀螺儀結構設計，增加石英陀螺儀質量塊重量，分析不同之幾何參數，充分利用以及提高晶片的有效面積，實現石英陀螺儀微型化之應用。本篇提出新穎的石英陀螺儀設計概念為有效提升質量塊的重量，方法為增加質量塊的有效振動面積以提升科氏力的偵測能力。新穎式石英微陀螺儀的工作原理為科氏力。科氏力產生是根據石英陀螺儀感測臂上的錐狀結構會產生剪切力。新穎式石英陀螺儀的自然共振頻率可分為兩種模態：驅動振動模態與感測振動模態，而兩模態之頻率差會影響元件的靈敏度。此外。論文中探討各種新穎式石英陀螺儀的結構對於頻率差的影響。本篇論文提出的新穎石英陀螺儀相較於傳統的設計擁有更大的填充率（filling factor，FF）。新穎式陀螺儀之填充率比傳統設計高13%，質量塊重量比傳統設計高315%，因此提升靈敏度11.1%。新穎式陀螺儀不但可達到石英陀螺儀微小化，也可達到增強科氏力訊號的能力。新穎式石英陀螺儀之自然共振頻率分析是利用CoventorWare 2010模擬軟體，新穎式石英陀螺儀之自然共振頻率差為838 Hz。

關鍵字

石英陀螺儀 ； 填充率 ； 自然共振頻率

並列摘要

Compared to traditional inertial sensing chip by CMOS-MEMS process, such as accelerometers and gyroscopes, QMEMS has excellent mechanical properties and better feature to calculate time precisely, especially as inertial sensors. A novel quartz gyroscope is proposed and it is based on increasing weight of proof mass and higher filling factor to increase sensitivity and reduce the production cost in this paper. Three kinds of geometrical parameters on proof mass is analyzed at the same time. The novel quartz gyroscope with new geometrical design which increases effective area of chips achieves the purpose of miniaturizing quartz gyroscope dramatically. The novel design concept of the quartz gyroscope is increasing weight of proof mass in the research. Enlarging effective vibration area of proof mass results in promoting the ability of sensing Coriolis effect. The working principle of quartz gyroscope is Coriolis effect. When a force pushes proof mass, Coriolis effect is yielded from tapered-shaped sensing beam of the novel quartz gyroscope. The natural frequency of quartz gyroscope has two vibration modes of frequency: driving mode and sensing mode. The difference between driving mode and sensing mode affects sensibility of quartz gyroscope. Therefore, from the various models of novel quartz gyroscopes, difference frequency between drive mode and sense mode is discussed in this research. In the research, the filling factor of the novel quartz gyroscope is 13% higher than that of the conventional quartz gyroscope. The weight of proof mass is 315% higher than that of the conventional quartz gyroscope. Therefore, the sensitivity of the novel quartz gyroscope is 11.1% higher than the conventional quartz gyroscope. Novel quartz gyroscope can achieve not only miniaturization but also enhancing the detection capacity to signals of Coriolis force. By CoventorWare 2010 simulation software, the difference of frequency from the novel quartz gyroscope between sensing mode and driving mode is 823.31Hz.

並列關鍵字

quartz gyroscope ； filling factor ； vibration frequency