薄膜電晶體液晶顯示器彩色瀘光片之欠陷分析

Analysis of Color Filter Defects for Thin Film Transistor Liquid Crystal Display

黃育森(Robin Huang) ； 溫武義(Wu-Yih Uen)

《先進工程學刊》 5卷4期 (2010/10) Pp. 307-315

https://doi.org/10.29948/JAE.201010.0004

摘要

本技術報告主要是探討『TFT-LCD關鍵零組件之彩色濾光片，在各個製程的瑕疵分析與分類』。近年來由於面板被大量使用，使得其需求量大增，因此所有面板廠無不增加面板產量和研發新尺寸。然而於面板製造流程中，面板常會因外在環境及機台本身因素而出現瑕疵，造成面板良率下降、成本增加，為了改善此問題，目前面板廠皆設有線上檢查機制，可在製造流程中進行玻璃基板抽樣檢查的工作，以防止大量不良面板之發生。但目前的檢查機制僅能進行抽檢動作，且皆為人工處理。為了取代人力、增加處理速度，讓面板進行全檢並即時傳送相關資訊給線上工程師，有必要導入即時且自動化之檢查機台系統。因此本技術報告將介紹彩色濾光片的製作流程，並且針對各個製程瑕疵成因進行解析，希望能對將來『自動化欠陷分類系統』缺陷資料庫的建立有所助益。

關鍵字

液晶顯示器 ； 彩色濾光片 ； 缺陷 ； 自動化

並列摘要

This technical report is concerned with the analysis and classification of defects found in various manufacturing processes of color filter, a key component of TFT-LCD. Due to the widespread applications, the demand for the panels has greatly increased. The panel manufacturers therefore have to increase the production and develop novel panels with a larger size. However, the panel defects are also easy to be found, originated from the manufacturing environment and/or machine instability, which causes the yield of panel to drop and therefore the cost of it to increase. To solve this problem, in-line MQC mechanisms are established. Through these mechanisms the glass substrates can be inspected by a random sampling ratio in the manufacturing process and the occurrence of a large number of unqualified panels is prevented. However, the current in-line MQC mechanisms are operated manually and only under a sampling ratio. To reduce the human power, increase the processing speed, inspect the whole substrates and pass the related information to the online engineers immediately, the introduction of an automatic inspecting system is required. Therefore, the processing of color filter and testing results of defect analysis and classification introduced in this report are expected to be favorable for installing the database of defects for an automatic defect inspecting system.

並列關鍵字

TFT-LCD ； color filter ； defect ； defect classification