以壓力閥控制液靜壓軸承等膜厚之探討

本文探討液靜壓閉式軸承油膜厚度保持等膜厚之控制，研究以壓力控制閥做為節流控制使負荷改變油膜在穩態厚度不變化，控制迴路以供油壓力、工作台位移、油腔流量及工作壓力作為回饋。計算保持穩態補償膜厚差所需之供壓，以供壓壓力差值之作為壓力控制閥之PID控制，進行位移補償控制，達到穩態等膜厚之目標值。在穩態等膜厚控制算法中，沒有靜壓軸承及平台系統之動態數學模型，因此在負荷改變時，需透過PID控制器系統以及類神經網路訓練的搭配使用才能夠達到暫態快速收斂、穩態能夠達到精準且穩定的補償系統。利用液靜壓軸承壓力現行補償方法，作控制法則的演算，提出數學模型，以壓力控制閥的等膜厚控制進行實驗驗證此控制法則的演算。透過實驗找出最佳的類神經訓練參數以及PID控制器之參數值，從調整係數當中找出最佳之類神經網路及PID控制器參數。本研究PID控制器已能達成次微米的穩態精度。

關鍵字

液靜壓軸承；膜厚控制；等膜厚

並列摘要

The objective of this study is to maintain the constant film thickness of the oil film thickness of the hydrostatic bearing closed table, and to discuss the pressure control of the pressure valve to solve the problem of film thickness change caused by the change of load, and to supply oil on the hydrostatic bearing closed workbench. The pressure, displacement meter signal and flow signal are used as feedback signals, and the control circuit is established by the pressure compensation control hydrostatic pressure table. In this paper, the pressure sensor and the displacement sensor are used to feedback the signal, and then the pressure difference and the displacement difference are calculated for pressure compensation to achieve the target value of the constant film thickness. In the constant film thickness pressure compensation system, it is necessary to use the neural network training and the PID controller system to achieve a transient and fast convergence, and the steady state can achieve a precise and stable compensation system. The current compensation method of hydrostatic bearing pressure is made, and the calculation of the control law is made. The mathematical model is proposed and verified by the film thickness control of the pressure control valve. The steady-state accuracy in few sub-micrometers can be achieved by Neueal Network and PID controller using the algorithm of this study.

並列關鍵字

Hydrostatic bearing ； film control ； constant thickness

國際替代計量

以壓力閥控制液靜壓軸承等膜厚之探討

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