搭配薄膜式節流器之液靜壓軸承設計修改與性能分析

Modifying and Analysis of Hydrostatic Linear Guideway With Membrane-type Restrictor

羅昱翔(Yu-Hsiang Lo)

指導教授 ： 林士傑

國立清華大學/工學院/動力機械工程學系/碩士(2019年)

摘要

液靜壓軸承的原理是透過外部加壓，將高壓流體打入油腔中，使軸與軸承面之間隙產生一層薄流膜介質。並利用液體壓力來承受負載，使兩面間不會產生固體的直接接觸，因此不會有磨耗及滯滑效應的產生。液體具有良好阻尼特性，不易傳遞振動造成之誤差，能有效提升工具機的加工精度。
薄膜式節流器發展至今，已有五十餘年的歷史，1962年，Mohsin證明使用薄膜式節流器之軸承，其靜態剛性與動態剛性皆高於使用固定式節流器的軸承。然而薄膜式節流器結構較固定式節流器複雜，尺寸設計與薄膜選用對於節流器性能的影響皆很顯著。目前國內對於薄膜式節流器之設計製造仍無法完全掌握，造成節流器性能與預期差距甚大。因此在此研究中將建立薄膜式節流器的模擬系統，預測軸承的實際性能表現，並使用模擬結果修正液靜壓滑塊系統的設計參數，目標提升液靜壓滑塊的性能，最後進行滑塊性能的量測實驗與模擬結果進行比對，討論可能產生差異的原因。

關鍵字

液靜壓軸承 ； 液靜壓線性滑軌 ； 薄膜式節流器

並列摘要

The operating principle of hydrostatic bearing is to pressurize fluid into the oil recess, to create a thin film between the bearing and the shaft. The pressure is used to bear the load so that no direct contact of solids occurs between the two surfaces, so theoretically there is no wear and stick-slip effect. The liquid is not easy to transmit the error caused by vibration and can effectively improve the machining accuracy of the machine tool.
Membrane-type restrictor have been developed for more than 50 years. In 1962, Mohsin proved that bearings with membrane-type restrictor have higher static and dynamic stiffness than bearings with passive restrictor. Nonetheless, the structure of the membrane-type restrictor is more complicated than the passive restrictor, and the key point such as parameter design, the selection of the diaphragm have significant effects on the performance of the restrictor. At present, the design and manufacture of the membrane type restrictor is still have a large gap between the performance and the expected. Therefore, in this study a simulation system of the membrane-type restrictor will be established, the performance of the bearing will be predicted, and simulation of the performance of the hydrostatic bearing system will be corrected using the experiment results In the end, the measurement of the slider performance is compared with the simulation results, and the reasons for the differences may be discussed.

並列關鍵字

Hydrostatic bearing ； Hydrostatic linear guideway ； Membrane-type restrictor

參考文獻

[1] P. Shore and P. Morantz, "Ultra-precision: Enabling Our Future," Philosophical Transactions of the Royal Society A: Mathematical, Physical & Engineering Sciences, pp. 3993-4014, 2012.

[2] M. E. Mohsin, “The Use of Controlled Restrictors for Compensating Hydrostatic Bearings,” 於 Advances in Machine Tool Design and Research: Proceedings of the 3rd International M.T.D.R. Conference, Birmingham, 1962.

[3] W. B. Rowe DSc and FIMechE, Hydrostatic, Aerostatic, and Hybrid Bearing Design, Elsevier Science, 2012.

[4] R. Bassani and B. Piccigallo, Hydrostatic Lubrication, Amsterdam: Elsevier Science, 1992.

[5] A. M. Loeb and H. C. Rippel, “Determination of Optimum Proportions for Hydrostatic Bearing,” A S E L Transactions, pp. 241-247, 1958.