無塵室(Clean Room)之氣流研究

胡石政 ； 周瑞法

《中國冷凍空調雜誌》 16期 (1994/10) Pp. 87-94

https://doi.org/10.7088/CJRACT.199410.0087

摘要

本文以三次元超波風速計詳細量測1運轉中的風扇濾網單元(Fan Filter Unit)型無塵室（簡稱CR）氣流的空氣紊流特性，由於篇輻限制本人僅討論工程上常用到的些特性，如速度向量，紊流動能(Turbulencelence Kinetic Energy)和紊流強度(Turbulence Intersity)。有別於傳統定義的紊流強度，本文中將對其有小輻度之修改，以符合具不同大小平均速度流場之紊流特性。本文的主旨在詳細描迷(1)空室時(2)安裝工作檯後，空室及工作檯周圍之風場紊流特性。本文量測所獲得之資料，不僅對於CR內流場技術之發展也能提供非常有用的資料。

並列摘要

Detailed air turbulence characteristics in a full-scale, operationing, fan filter unit (FFU) type clean room are reported. The measurements of the three components of air velocity were conducted by using a three-dimensional ultrasonic anemometer. Mean velocity vectors, turbulence kinetic energy, and turbulence intensity were discussed in detail. A slight redefinition of the conventional turbulence intensity is proposed to compare the degree of turbulence in the clean room which with large difference in mean velocity distribution. The detailed experimental data are not only useful for cleanroom design and equipment layout but also significant for numerical modelling of the cleanroom air motion.