並列摘要
A sub-aperture stitching interferometry method is developed to test the surface deformation of the high NA, large diameter or aspherical lens. The principle of the optical testing method is based on the 4 axes geometrical null utilizing the axial symmetry property of the test lens. The measurement throughput is significantly increased by adapting the rotational scanning mechanism. By adapting the vibration insensitive phase shifting algorithm, we are able to extract the phase of the interferogram reflected from an asphere during the rotational scanning motion in the presence of mechanical vibration from the moving stages.
延伸閱讀
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