六自由度奈米平台之終端姿態回授控制系統設計研究

Design of the Sensor-Feedback Task-Space Control System for a 6DOF Nanoscale Platform

李俊忠(Chun-Chung Li)

指導教授 ： 丁鏞

中原大學/工學院/機械工程研究所/博士(2010年)

https://doi.org/10.6840/cycu201001075

摘要

本論文研究之目標為研製一座利用壓電致動器驅動之六自由度史都沃特式奈米平台，另設計以適當架設之感測器位置可以直接量測空間六自由度之位移及方位幾何參數，以配合終端姿態回授控制系統之建立。所發展之控制系統不但可直接控制奈米平台之終端姿態，且結合以反壓電遲滯模型所建立之前饋控制器及以PID為基礎之回授控制器，可以大幅提高其定位精度。研究內容主要包括六自由度米平台之數學模式推導、六自由度之量測方法設計、誤差補償校正、壓電遲滯模型建立及前饋控制器設計、與利用基因演算法尋找最佳PID增益控制參數、及混合式位置/力量之終端姿態空間回授控制法則，及撰寫以PC-based為基礎之系統整合控制程式，以及探討在有/無外力作用的情況下，單獨使用前饋控制器或混合式位置/力量回授控制器，以及結合前饋與回授控制器，分別進行測試各種控制器，瞭解平台受不同外力影響之剛性能力及定位精度，並比較驗證其功能。

關鍵字

壓電致動器 ； 混合式位置/力量控制器 ； 終端姿態空間回授控制 ； 六自由度史都沃特式奈米平台 ； 壓電遲滯模型

並列摘要

The objective of this thesis is to build a 6DOF Stewart nanoscale platform driven by piezoelectric actuators. Via appropriate sensor setup, direct measurement of the position and orientation of the platform is achieved, by which the task-space control scheme is thus designed. Such a control scheme can not only reach the purpose of control on the end-effector directly but also provides high precision by using a hysteresis model-based feedforward controller in combination with a PID-based feedback controller. The research topics include the derivation of mathematical model of 6DOF Stewart nanoscale platform, design of 6DOF measurement method, design of error compensation method, feed-forward controller design on the basis of hysteresis modeling of piezoelectric actuator, searching optimal PID gain by use of genetic algorithm, and design of hybrid position/force feedback control, programming and system integration based on PC-based structure, and testing and evaluation the performance of using single feedforward controller or feedback controller as well as composite feedforward+feedback controller under the condition of without/with external force.

並列關鍵字

piezoelectric actuator ； 6DOF Stewart nanoscale platform ； hysteresis model ； hybrid force/position controller ； task-space control

參考文獻

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