次微米非接觸式鑽石刀具輪廓線上監測系統之研究

Design and Development of Sub-micron Non-contact Diamond Tool Profile Monitoring System

陳星光(Shing-Kuang Chen)

指導教授 ： 趙崇禮

共同指導教授 ： 趙崇偉(Choung-Wei Chao)

淡江大學/工學院/機械與機電工程學系碩士班/碩士(2005年)

https://doi.org/10.6846/TKU.2005.00188

摘要

刀具輪廓形狀誤差係影響精密鑽石切削作業精度之主要因素。傳統刀具輪廓量測方式是以LVDT直接接觸刀具輪廓，量測出其形狀，該方式之量測精度取決於探針之解析度，一般介於1∼10μm之間，然而在量測過程中極易因不當接觸造成鑽石刀具受損。
本研究在研發一套光學量測系統，利用影像處理技術，量測刀具輪廓，取代傳統刀具輪廓量測方式，改善解析度不足、無法線上量測之缺點。以現有之系統解析度（mm/pixel）仍無法滿足目前加工精度需求。本刀具輪廓量測系統，配合動差?痚坁k則，計算刀具輪廓至次像素（subpixel），依據刀具磨耗程度，即時補償輪廓誤差，能有效提升刀具輪廓量測精度。實驗證明本系統可將刀具輪廓量測誤差控制在 0.2μm以內。

關鍵字

刀具輪廓監測 ； 機器視覺 ； 次像素

並列摘要

Error of the tool profile is an important factor which affects the precision in ultra-precision diamond turning operation. Traditionally, the measure method of the tool profile is used LVDT directly to contact and detect the tool profile. But the precision of this method was depend on the resolution of probe which limited around 1~10μm. Additionally, it is running the risk of damaging the delicate tool tip. In this study, we proposed a new optical measurement method which can improve the disadvantages of traditional measurement method. It used the image processing technology combined moment-preserving principle, which can calculate the tool profile precision to sub-pixel. In addition, the wear of tool can be compensated on-line by this method and ensure the measurement precision of tool profile. From those experimental results showed the error of the tool profile can be controlled in the range of about 0.2μm.

並列關鍵字

Tool profile monitoring ； Machine vision ； Sub-pixel

參考文獻

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