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研究生： 黃暐仁
Wei-Ren Huang
論文名稱： 大負斜角精微聚晶鑽石球型研削工具開發與微小碳化鎢模仁加工研究
Development of micro BD-PCD ball grinding tool with a large negative-back-rake-angle and research of micro tungsten carbide die machining
指導教授： 陳順同
Chen, Shun-Tong
學位類別： 碩士
Master
系所名稱： 機電工程學系
Department of Mechatronic Engineering
論文出版年： 2012
畢業學年度： 100
語文別： 中文
論文頁數： 108
中文關鍵詞： 高剛性桌上型工具機 、精微聚晶鑽石球型研削工具 、碳化鎢模仁陣列
英文關鍵詞： High rigidity tabletop machine tool, micro BD-PCD ball grinding, tungsten carbide die array
論文種類： 學術論文
相關次數： 點閱：618  下載：6 
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    • 本研究旨在開發、設計及製造「大負斜角的BD-PCD球型研削工具」，並應用高剛性桌上型工具機，進行微小碳化鎢模仁的研削創成加工研究。研究之初，以粒徑10-15 µm的BD-PCD片料，利用高週波銀焊技術，將其焊至碳化鎢刀柄上。聚晶鑽石刀具粗胚再以旋轉式線切割放電加工法，成形精微含硼聚晶鑽石球型研削工具。為避免材料移除過程中，研削工具與碳化鎢模仁因高速研削與擠壓，而引發研削刃與模仁的脆性破壞，本研究提出一種「大負後斜角設計」的概念，使球型研削工具刀頂面與工具中心線具-50°的大後斜角。如此設計，可使球型研削工具上的微細鑽石切刃與碳化鎢模仁均承受壓應力，免於脆性破壞。為預防球型研削工具中心點因研削速度為0，而發生的擠壓破壞，研削工具刀頂面設計以跨越工具中心線，以避免靜態擠壓。球型研削工具採線上線切割放電成形，亦即球型研削工具被加工與球型研削工具加工碳化鎢模仁的過程中，研削工具均不拆卸，以便維持其最高同心精度，且可省卻繁複校正時間。而碳化鎢模仁以高速快淺研削技術及浸油對流方式，進行研削創成，實驗結果顯示，無論是微小溝槽或微小陣列式非球面模穴的加工，均可獲致高形狀精度與良好的表面性狀，微溝及非球面模穴的表面粗糙度分別達Ra 112 nm與1.29 µm。顯示本研究開發的精微含硼精微聚晶鑽石球型研削工具，能成功應用於精微非球面碳化鎢模仁的開發製作，其製程所需成本低、環保且加工精度高，未來可應用於照明等級的精微透鏡產業應用。

    The primary purpose of the thesis is to develop a micro BD-PCD ball grinding tool with a large negative-back-rake-angle and using the finished tool to generate micro tungsten carbide die array. The BD-PCD substrate with diamond grit of 10-15 µm is first welded onto a WC shank by means of high-frequency silver brazing. Subsequently, the micro BD-PCD ball grinding tool is formed by rotary wire Electrical Discharge Machining (RWEDM). To prevent the occurrence of squeeze failure between the tool and die, the negative-back-rake-angle of the tool is designed up to -50° whereby the diamond grain and WC die can all bear uniform compression stress. In addition, the tool face is schemed with crossing the center line of tool so as to avoid squeeze effect occurs at the center of the free end of the tool due to it being devoid of cutting speed. The developed grinding tool is used to grind WC die using an in-situ HSFSG (High-Speed & Fast-Shallow Grinding) technique. Generating the aspheric micro die array in-situ saves a lot of time and fiddly pre-processing in the development of micro molds. Experimental results demonstrate that the micro aspheric die array with high dimensional and geometrical accuracy can be achieved successfully. The surface roughness of the microgroove and die-cavity is down to Ra 112 nm and 1.29 µm, respectively. The BD-PCD ball grinding tool is evaluated and discussed with regard to thermal machinability, graphitizing of diamond, orientation of spark erosion and wear processes as well as life expectancy. It is expected that the techniques used in the development of micro die array in WC should contribute greatly to the field of precision optoelectronic industry.

    中文摘要 i 英文摘要 ii 誌謝 iii 目錄 iv 表目錄 viii 圖目錄 x 符號說明 xv 第一章 緒論 1 1.1 前言 1 1.2 研究動機 2 1.3 研究目的 4 1.4 研究方法 4 1.5 文獻回顧 6 1.5.1 鑽石刀具開發與應用現況 6 1.5.2 微小模具開發現況 10 第二章 聚晶鑽石研削工具製作原理與應用 17 2.1 放電加工原理 17 2.1.1 精微雕模放電加工原理 18 2.1.2 精微線切割放電加工原理 19 2.2 BD-PCD導電原理 20 2.3 高週波焊接原理 21 2.4 高速快淺研削原理 22 2.4.1 研削基本原理 23 2.4.2 硬脆材料研削移除機制 25 2.4.3 高速快淺研削原理應用 26 2.5 聚晶鑽石刀具之溶蝕與銳化 27 第三章 實驗設備與設計 29 3.1 CNC線切割放電加工機應用 29 3.2 高速主軸應用 29 3.3 導電迴路設計 30 3.4 CNC立式綜合加工機應用 31 3.5 高剛性桌上型工具機應用 32 3.6 軟體應用 33 3.6.1 非球面產生器 33 3.6.2 電腦輔助製造(CAM) 34 3.7 量測設備 35 3.7.1 工具顯微鏡 35 3.7.2 掃描式電子顯微鏡 36 3.7.3 3D雷射共焦顯微鏡 36 3.7.4 表面形狀量測儀 37 3.7.5 拉曼光譜儀 37 3.8 實驗材料 38 3.8.1 含硼聚晶鑽石(BD-PCD) 38 3.8.2 銅線電極 39 3.8.3 拋光用鑽石膏 40 3.8.4 模具基材-P類碳化鎢 40 第四章 實驗方法 41 4.1 精微聚晶鑽石球型研削工具設計與開發 42 4.1.1 精微聚晶鑽石球型研削工具設計與分析 43 4.1.2 放電切割方向對研削工具成形的影響 44 4.1.3 放電間隙補償對研削工具成形的影響 46 4.1.4 放電週期對研削工具成形的影響 47 4.1.5 放電能量對研削工具成形的影響 49 4.1.6 精微聚晶鑽石球型研削工具開發驗證 50 4.2 切削阻力對高硬度材料加工的影響 54 4.2.1 精微聚晶鑽石半球型研削工具設計與分析 55 4.2.2 刀具形狀對研削阻力的影響 58 4.2.3 刀具進給方向對研削阻力的影響 59 4.2.4 切削劑對研削阻力及模具面粗度的影響 61 4.3 BD-PCD刀具磨耗、填塞與變質層探討 68 4.3.1 BD-PCD研削工具磨耗探討 68 4.3.2 BD-PCD研削工具填塞與銳化 70 4.3.3 聚晶鑽石刀具之石墨化 72 第五章 碳化鎢微小模仁之研削創成驗證 74 5.1 微細溝槽研銑創成實驗 74 5.1.1 研削速度對模仁表面粗糙度的影響 74 5.1.2 研銑進給率對表面粗糙度的影響 78 5.1.3 研銑深度對模仁表面粗糙度的影響 81 5.1.4 微細溝槽研削創成驗證 84 5.2 非球面陣列模仁創成實驗 86 5.2.1 非球面微透鏡模仁設計與開發 87 5.2.2 非球面模仁研削路徑選用 89 5.2.3 進給率對非球面模仁表面粗糙度的影響 90 5.2.4 Z軸補正對非球面模具形狀精度的影響 92 5.2.5 非球面陣列模仁設計與開發驗證 94 第六章 結論與未來展望 98 6.1 結論 98 6.2 未來展望 101 參考文獻 102 作者簡歷 I

    1. M. Jalie,〝The Principles Ophthalmic Lenses〞, London: The Association of Dispensing Opticians, 1992
    2. 南京神童特種玻璃技術有限公司,〝ZnSe遠紅外線玻璃〞,
    http://www.shentong.cc/hongwaixianboli.html
    3. T. Zhou, J. Yan, J. Masuda, T. Kuriyagawa, 〝Investigation on the viscoelasticity of optical glass in ultraprecision lens molding process〞, Journal of Materials Processing Technology, Vol.209, pp.4484-4489, 2009
    4. J. Colegrove,〝Pocket Projector Technology and Market Forecast〞, Display Search, 2010
    5. 李佳恬, 〝待起飛的微投影產業概況分析, 工業技術研究院〞, Vol.10005, 2011
    6. D.A. Axinte, D.S. Srinivasu, M.C. Kong, P.W. Butler-Smith,〝Abrasive waterjet cutting of polycrystalline diamond:A preliminary investigation〞, International Journal of Machine Tools & Manufacture, Vol.49, pp.797-803,2009
    7. S.W. Youn, M. Takahashi, H. Goto, R. Maeda,〝Fabrication of micro-mold for glass embossing using focused ion beam,femto-second laser, eximer laser and dicing techniques〞, Journal of Materials Processing Technology, Vol.187-188, pp.326-330, 2007
    8. G. Chung, 〝Characteristics of SiCN microstructures for harsh environment and high-power MEMS applications〞, Microelectronics Journal, Vol.38, pp.888-893, 2007
    9. D. Keen,〝Extraneous inclusions in Al/Si alloy pistons: their effect on single crystal and polycrystalline diamond turning tool edges〞, Wear, Vol. 31, pp.185-188, 1975
    10. Z.L. Wang, Q. Luo, L.W. Liu, C.Y. Li, H.X. Yang, H.F. Yang, J.J. Li, X.Y. Lu, Z.S. Jin, L. Lu,〝C.Z. Gu, The superconductivity in boron-doped polycrystalline diamond thick films〞, Diamond & Related Materials, Vol. 15, pp.659-663, 2006
    11. H. Suzuki, T. Moriwaki, Y. Yamamoto, Y. Goto, 〝Precision Cutting of Aspherical Ceramic Molds with Micro PCD Milling Tool〞, Annals of the CIRP Vol. 56, pp.131-134, 2007
    12. K. Suzuki, Y. Shiraishi, N. Nakajima, M. Iwai, S. Ninomiya, Y. Tanaka, T. Uematsu,〝Development of New PCD Made Up of Boron Doped Diamond Particles and its Machinability by EDM〞, Advanced Materials Research, Vol. 76-78, pp. 684-689, 2009
    13. C. Nath, M. Rahman, K. S. Neo,〝Machinability study of tungsten carbide using PCD tools under ultrasonic elliptical vibration cutting〞, International Journal of Machine Tools & Manufacture, Vol. 49, pp.1089-1095, 2009
    14. H. K. Park, H. Onikura, O. Ohnishi, A. Sharifuddin, 〝Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics〞, Precision Engineering, Vol. 34, pp.376-386, 2010
    15. 張智賢, 〝桌上型雙主軸超精微CNC工具機開發與細胞鏡檢模仁製作研究〞, 國立臺灣師範大學機電科技學系碩士論文, pp.112-115, 2011
    16. K. Katahira, K. Nakamoto, P. Fonda, H. Ohmori, K. Yamazaki, 〝A novel technique for reconditioning polycrystalline diamond tool surfaces applied for silicon micromachining〞, CIRP Annals-Manufacturing Technology, Vol. 60, pp.591-594, 2011
    17. 斯東光電有限公司, 〝非球面的應用〞, http://www.stoneoptics.com/newsxx.asp?idx=81
    18. 趙崇禮，馬廣仁，林宏彞，微模具製程技術發展現況，機械工業雜誌，第279期，2006，pp.43-52
    19. 楊錫杭，黃俊瑋，紫外光固化膠製作微透鏡陣列之新式製程研究，中國機械工程學會第21屆全國學術研討會論文集，2004，pp.5055-5060
    20. W.K. Chen, T. Kuriyagawa, H. Huang, N. Yosihara,〝Machining of micro aspherical mould inserts〞, Precision Engineering, Vol.29, pp.315-323, 2005
    21. K.-S. Jung, H.-M. Kim, S.-J. Lee, N.-C. Park, S.-I. Kang, Y.-P. Park,〝Design of optical path of pickup for small form factor optical disk drive〞, Microsyst Technol, Vol. 11, pp. 1041-1047, 2005
    22. C.S. Lim, M.H. Hong, A. Senthil Kumar, M. Rahman, X.D. Liu, 〝Fabrication of concave micro lens array using laser patterning and isotropic etching〞, International Journal of Machine Tools & Manufacture, Vol. 46, pp. 552-558, 2006
    23. Y. Takeuchi, Y. Yoneyama, T. Ishida, T. Kawai,〝6-Axis control ultraprecision microgrooving on sculptured surfaces with non-rotational cutting tool〞, CIRP Annals - Manufacturing Technology, Vol.58, pp.53-56, 2009
    24. B. Lee, Kyung J. Cha, T. H. Kwon,〝Fabrication of polymer micro/nano-hybrid lens array by microstructured anodic aluminum oxide (AAO) mold〞, Microelectronic Engineering, Vol. 86, pp. 857-860, 2009
    25. J. Yan, Z. Zhang, T. Kuriyagawa,〝Tool wear control in diamond turning of high-strength mold materials by means of tool swinging〞, CIRP Annals - Manufacturing Technology, Vol.59, pp.109-112, 2010
    26. T. Zhou, J. Yan, T. Kuriyagawa,〝Study on nonisothermal glass molding press for aspherical lens〞, Journal of advanced mechanical design,system,and Manufacturing, Vol. 4, pp. 806-815, 2010
    27. J. Yan, Z. Zhang, T. Kuriyagawa, H. Gonda,〝Fabricating micro-structured surface y using single-crystalline diamond endmill〞, Int J Adv Manuf Technol, Vol. 51, pp. 957-964, 2010
    28. D. H. Cha, H. S. Park, Y. Hwang, J. H. Kim, H. J. Kim,〝Experimental Study of Glass Molding Process and Transcription Characteristics of Mold Surface in Molding of Aspheric Glass Lenses〞, Optical review, Vol. 18, pp.241-246, 2011
    29. A. Beaucamp, Y. Namba, I. Inasaki, H. Combrinck, R. Freeman,〝Finishing of optical moulds to l/20 by automated corrective polishing〞, CIRP Annals - Manufacturing Technology, Vol.60, pp.375-378, 2011
    30. Sakshat virtual labs,〝To study erosion mechanism from Lazarenko's model〞, http://coep.vlab.co.in/?sub=34&brch=105&sim=237&cnt=1
    31. Charmilles technologies ROBOFIL 300, pp. 1.1.4-1.1.5, 1993
    32. C. Sommer, Non-traditional machining handbook, Advance Publishing, Inc., pp.117-124, 2000
    33. Bilbao, SPAIN, 〝Proceedings of the 13th International Symposium for electromachining isem XIII〞, May 9th-11th, pp.4, 2001
    34. 陳順同,〝精微製造工程〞, 講義, 2011
    35. 機械技術雜誌編輯部,〝二十一世紀的顯學微機電系統(四)-微放電精密加工，機械技術雜誌〞, pp. 220-222, 2000
    36. 蕭瑞陽,〝放電加工原理與應用-線切割放電加工〞,
    http://eshare.stut.edu.tw/EshareFile/2010_4/2010_4_e1e12437.ppt/
    37. K. Okano, Y. Akiba, T. Kurosu, M. Iida, T. akamura,〝Synthesis of B-doped diamond film〞, Journal of Crystal Growth, Vol. 99, pp.1192-1195, 1990
    38. C. Sommer, Non-traditional machining handbook, Advance Publishing, Inc., pp.117-124,2000
    39. S. Kalpakjian, S. R. Schmid, Manufacturing engineering and tehnology, Prentice Hall International, 4th edition, pp.803-810, 2001
    40. 厚利貿易股份有限公司, 高週波熱處理,
    http://www.sunholy.com.tw/epaper/NO.77/77.pdf
    41. 達訊感應科技股份有限公司, 高週波加熱機, http://www.allma.net/all-induction/tw_af-12kw.php
    42. I. S. Kang, J. S. Kim, J. H. Kim, M. C. Kang, Y. W. Seo,〝A mechanistic model of cutting force in the micro end milling process〞, Journal of Materials Processing Technology, Vol. 87, pp. 250-255, 2007
    43. X. M. Lai, H. T. Li, C. F. Li, Z. Q. Lin, J. Ni,〝Modelling and analysis of micro scale milling considering size effect, micro cutter edge radius and minimum chip thickness〞, Journal of Machine Tools and Manufacture, Vol. 48, pp.1-14, 2008
    44. S. M. Son, H. S. Lim, J. H. Ahn,〝Effects of the friction coefficient on the minimum cutting thickness in micro cutting〞, Journal of Machine Tools and Manufacture, Vol.45, pp.529-535, 2005
    45. 倪軍,〝Proceeding of Some recent advancement in Micro/Meso scale manufacturing〞, University of Michigan, 2004
    46. 庄司克雄, 超精密加工と非球面加工, NTS, ISBN4-8043-059-X C3050, 2004
    47. S. Blackeley, R. O. Scattergood,〝Mechanics of material removal in diamond turning〞, Proceedings of ASPE Annual Meeting, Rochester NY, USA, pp. 68-71, 1990
    48. M. Miyashita,〝Ist Annual Precision Engineering Conference〞, North Carolina State University, Raleigh, NC, November 1985
    49. B. K. A. Ngoi, P. S. Sreejith,〝Ductile Regime Finish Machining-A Review〞, Int J Adv Manuf Technol, Vol. 16, pp. 547-550, 2000
    50. 維基百科, 腐蝕, http://zh.wikipedia.org/wiki/%E8%85%90%E8%9A%80
    51. 慶鴻機電, 線切割機保養手冊, B1 edition, 2008
    52. NAKANISHI INC., Motors& Spindles Micro-grinders, 9th edition, pp.2-9&2-29, 2008
    53. 台中精機, 立式綜合加工機http://www.or.com.tw/uploads/product/OR_Vcenter_55_70.pdf
    54. 黃瑋平, 〝低成本高剛性微型工具機開發與高精度陣列光學微模具製作研究〞, 國立臺灣師範大學機電科技學系碩士論文, pp. 67-68, 2011
    55. Yung-Tien Liu, Wei-Che Chang, Yutaka Yamagata, 〝A study on optimal compensation cutting for an aspheric surface using the Taguchi method〞, Vol. 3, pp.40-48, 2010
    56. 欣昊實業股份有限公司,〝MasterCAM X5〞, http://www.mastercam.com.tw/
    57. 漢磊股份有限公司,〝工具顯微鏡〞, http://www.aixon.com.tw/
    58. 日本電子株式會社,〝掃描式電子顯微鏡〞
    59. KEYEMCE,〝雷射共焦顯微鏡〞
    60. 中美科學股份有限公司,〝表面形狀輪廓儀〞
    61. HORIBA,〝分析級拉曼光譜儀〞, http://www.horiba.com/cn/scientific/products/raman-spectroscopy/raman-systems/research-raman/details/t64000-140/
    62. 江信有限公司,〝BD-PCD〞,
    http://www.factdiamond.com/contact/main.htm
    63. 璧山金屬有限公司,〝黃銅電極〞
    64. 台灣安普產品有限公司, 鑽石膏http://www.taiwanservices.com.tw/org2/0/company_detail/zh_TW/158478
    65. Davis, J. R., "ASM Specialty Handbook, Tool Materials", ASM International, Materials Park, OH 440730002, pp.88, 1995
    66. J.L Meriam, L.G.Kraige, Engineering mechanics dynamics, 5th edition, pp.56-58, 2003
    67. T.R. Anthony, W.F. Banholzer, J.F. Fleischer, L. Wei, P.K. Kuo, R.L. Thomas, and R.W. Pryor, Thermal diffusivity of isotopically enriched 12C diamond, PHYSICAL REVIEW B, Vol.42, No.2, pp.1104-1111, 1990
    68. Y.A. Cengel, Heat and mass transfer, a practical approach, 3rd, McGraw-Hill, pp.74-77, 2006
    69. 田中義信, 津和秀夫, 井川直哉, 精密加工技術全集, 復漢出版社, pp.275-350, 1990
    70. T.Tawakoli, M.J. Hadad, M.H. Sadeghi, Influence of mist parameters on minimum quantity lubrication- MQL grinding process, International Journal of Machine Tools & Manufacture, Vol. 50, pp. 521-531, 2010
    71. Taylor F W, On the art of cutting metals, Transactions of ASME, Vol.28, pp. 31-58, 1907
    72. Shane A. Catledge, Yogesh K. Vohra, Ram Ladi, Ghanshyam Rai, Micro-Raman stress investigations and X-ray diffraction analysis of polycrystalline diamond (PCD) tools, Diamond and Telated Materials, Vol. 5, pp. 1159-1165, 1996

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