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研究生: 王世安
Wang, Shih-An
論文名稱: 整合氧化鋁鐵電記憶體之氧化錫薄膜電晶體元件電性探討之研究
Investigation of Tin-Oxide Thin Film Transistor Integrated with HfAlOx Metal-Ferroelectric-Metal Memory
指導教授: 鄭淳護
Cheng, Chun-Hu
學位類別: 碩士
Master
系所名稱: 機電工程學系
Department of Mechatronic Engineering
論文出版年: 2019
畢業學年度: 107
語文別: 中文
論文頁數: 61
中文關鍵詞: 薄膜電晶體氧化錫鐵電電容鐵電記憶體
英文關鍵詞: Thin Film Transistor, Tin Oxide, Metal-Ferroelectric-Metal Capacitor, Ferroelectric memory
DOI URL: http://doi.org/10.6345/NTNU201901085
論文種類: 學術論文
相關次數: 點閱:79下載:0
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  • 摘要 i 誌謝 iii 目錄 iv 圖目錄 vi 表目錄 x 第一章 緒論 1 1.1薄膜電晶體 1 1.2次臨界擺幅 2 1.3鐵電材料特性 3 1.4研究動機與目的 4 第二章 文獻回顧 6 2.1薄膜電晶體 6 2.2鋁摻雜於HfO2之效應 9 2.3負電容材料電晶體與電容匹配之問題 11 第三章 實驗方法 19 3.1實驗流程 19 3.2量測與分析之方法 23 第四章 結果與討論 29 4.1 MFM鐵電電容之漏電流及鐵電特性於不同退火溫度之影響 29 4.2 P型氧化錫薄膜電晶體之電性量測 38 4.3 P型薄膜電晶體串聯於不同厚度及面積之鐵電電容之電性 42 4.4 P型氧化錫薄膜電晶體串聯於10nm HfAlOX鐵電電容之Data Retention測試 55 第五章 結論 58 參考文獻 60

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