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研究生: 石智強
Chih Chiang Shih
論文名稱: 溫度與吸附氣體對鈮針場發射特性的影響
Effects of temperature and absorption gases to field emission properties of niobium tips
指導教授: 黃英碩
Hwang, Ing-Shouh
傅祖怡
Fu, Tsu-Yi
學位類別: 碩士
Master
系所名稱: 物理學系
Department of Physics
論文出版年: 2014
畢業學年度: 103
語文別: 中文
論文頁數: 78
中文關鍵詞: 鈮針場離子顯微鏡場發射功函數
英文關鍵詞: Niobium tip, field-ion microscopy, Field-emission, work function
DOI URL: https://doi.org/10.6345/NTNU202205377
論文種類: 學術論文
相關次數: 點閱:60下載:5
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  • 鈮奈米針於先前的研究指出當鈮在9.2K時具有超導性,在此溫度下將其作為一電子源所發射出來的電子束會因為其超導的關係同時具有良好的空間同調性及時間同調性。因此鈮針在當成電子源的研究也具有其重要性。為了更深入了解鈮奈米針的特性及結構,我們將多晶鈮線蝕刻成針尖後置入超高真空環境的場離子顯微鏡,藉由通電流加熱使其形成熱穩定性的奈米針並同時觀察針間的皺化過程,在鈮針尖施加負高壓使針尖場發射出電子,並分析其電子電流的特性。
    當鈮針被加熱到1319K時,可以在表面上觀察到4個{310}擴張擠壓{100}面形成皺化的平台,此時在針尖施加負高壓可以觀察到{100}平台由於功函數較低會場發射出電子。而當針尖加熱超1473K時,可以看到{100}面也有擴張的趨勢產生,此時並不會場發射出電子。
    測量{100}面時通入不一樣的惰性氣體的場發射電流,經過量測一小時後的電流值會大於一開始所測量到的電流值。而通入氬氣時,一小時後的電流增加幅度比其於氣體小,通入越大分子量的惰性氣體其F-N plots斜率會上升。

    Niobium(Nb) tips play an important role in scientific research of electron source. According to the precious study, electron beams field-emitted from Nb tips at 9.2K of good spatial and temporal coherence due to superconductivity of the tips. To investigate the structure and properties of Nb tips, we fabricated Nb tips by electrochemical process, followed by annealing the tips in ultra-high-vaccum(UHV) environment, to obtain thermally stable Nb nano-tips. The faceting process when annealing the tips were observed in field-ion microscope. Field-emission currents of Nb tips under different temperatures and various inert gases were recorded and discussed.
    We recorded the field-ion microscopy (FIM) images to observed the faceting process when annealing Nb tips. When the annealing temperature raised to 1319K, {100} plane formed at tip and due to the expansion of four surrounded {311} planes. If a negative bias was applied on the tip electron beam field-emitted from {100} plane, which has the lowest field emission work function can be observed.
    Field-emission currents under various inert gases environment were discussed. Small currents were obtained in the beginning of exposing tips under inert gas environment, but the currents gradually increased with time . Increasing values of the current and F-N plots under different gases environments were shown and discussed in this study.

    致謝 I 摘要 II Abstract III 目錄 III 表目錄 XIII 第一章 緒論 1 1-1 研究動機 1 1-2 奈米針的發展歷史 5 1-3 單原子針的優點 8 1-4 場離子顯微鏡的優點 10 第二章 實驗原理 11 2-1 場發射顯微鏡原理 11 2-2 場離子顯微鏡的成像原理 16 2-3 場離子化機制 18 2-4 場退吸附與場蒸發 22 2-5 場離子影像說明 26 2-6 表面皺化機制 30 第三章 實驗儀器與步驟 31 3-1 場離子顯微鏡的儀器裝置 31 3-2 樣本製備 40 第四章 實驗結果與分析 44 4-1 加熱Nb線材的影響 44 4-2 去除Nb tip 表層的氧化物 47 4-3 辨別Nb表面結構指數面 49 4-4 (100)面平台與擴張討論 51 4-5 Nb tip 不同加熱溫度電流穩定性比較 57 4-6 Nb tip 不同吸附氣體電流穩定性比較 66 4-7 Nb tip 不同吸附氣體F-N plot比較 69 第五章 結論 73 4-1 加熱Nb線材的影響 73 4-2 去除Nb tip 表層的氧化物 73 4-3 辨別Nb表面結構指數面 73 4-4 (100)面平台與擴張討論 73 4-5 Nb tip 不同加熱溫度電流穩定性比較 73 4-6 Nb tip 不同吸附氣體電流穩定性比較 74 4-7 Nb tip 不同吸附氣體F-N plot比較 74 參考文獻 75

    [1]林砡君, “覆銠、銥於鎢針上產生的皺化行為及其相關研究”,國立台灣師範大學碩士論文 (2005)
    [2]吳俊毅, “單原子尖度金字塔形鎢針的結構與應用之研究”,國立台灣師範大學碩士論文 (2003)
    [3]陳怡如, “覆鈀、銥於鉬針形成金字塔單原子針尖之研究”,國立台灣師範大學碩士論文 (2011)
    [4]陳曉琪, “覆鉑、銠於鉬針形成金字塔單原子針尖之研究”,台灣師範大學碩士論文 (2012)
    [5]黃穎祥, “氧氣誘發銥(210)面皺化現象:金字塔結構銥單原子針的製備條件分析”,國立台灣師範大學碩士論文 (2007)
    [6]戴鵬哲, “氫、氧誘發鎳表面金字塔型單原子針尖”,國立台灣師範大學碩士論文 (2009)
    [7]單原子電子源與離子源之應用科儀新知(第三十一卷第二期2009.10)
    [8]Chang C-C, Kuo H-S, Tsong T T and Hwang I-S , “A fullycoherent electron beam from a noble-metal covered W(111)single-atom emitter Nanotechnology Nanotechnology”.20 115401.(2009)
    [9]Gadzuk, J. W. “Many-body tunneling-theory approach to field emission of electrons from solidsSurface Science”.15.3 (1969)
    [10]superconductivity
    [11]Uehara, Y., et al. “Single NbO nano-crystal formation on low temperature annealed Nb (001) surface”. Surface science 472.1 (2001)
    [12]Shimizu, Ryota, et al. “Preparation of Superconducting Niobium Tips for Atomic-Resolution Scanning Tunneling Microscopy/Spectroscopy”.Japanese Journal of Applied Physics 49.2R (2010)
    [13]Nagaoka, K., et al. “Monochromatic electron emission from the macroscopic quantum state of a superconductor. ” Nature 396.6711 (1998)
    [14]Hasselbach, Franz. “Progress in electron-and ion-interferometry.” Reports on Progress in Physics 73.1 (2010)
    [15]Hans-Werner Fink , “Point source for ions and electrons”,Phys. Scr. 38 260,(1988)
    [16] Hans-Werner Fink, “Mono-atomic tips for scanning tunneling microscopy”,IBM J. Res. Dev. 30,460 (1986)
    [17][3] T. Y. Fu, L. C. Cheng, C. H. Nien and T. T. Tsong, “Method of Creating a Pd-Covered Single Atom Sharp W Pyramidal Tip: Mechanism and Energetic of Its Formation”, Phys. Rev. B 64 , 113401-04 (2001).
    [18]Hong-Shi Kuo, “Noble Metal/W(111) Single-Atom Tips and Their Field Electron and Ion Emission Characteristics ”,Jpn. J. Appl. Phys. 45 8972(2006)
    [19] T.E. Madey, C.-H. Nien, K. Pelhos, J.J. Kolodziej, I.M. Abdelrehim, H.-S. Tao,“Coexistence of {011} facets with {112} facets on W(111) induced by ultrathin films of Pd”, Phys. Rev. B 59,10335 (1999)
    [20] A. P. Janssen and J. P. Jones, “The sharpening of field emitter tips by ion sputtering”, J. Phys. D: Appl. Phys. 4118,(1971)
    [21]Moh’d Rezeq, Jason Pitter, Robert Wolkow, “Tungsten nanotip fabrication byspatially controlled field-assisted reaction with nitrogen”, J. Chem. Phys.124,204716 (2006)
    [22] Binh, V.T. and N. Garcia, “On the Electron and Metallic Ion Emission from Nanotips Fabricated by Field-Surface-Melting Technique -Experiments on W and Au Tips”. Ultramicroscopy. 42(1992)
    [23]S. K. Guharay and J. Orloff, “Ion Beams and Their Applications in High-ResolutionProbe Formation”,IEEE Trans. Plasma Sci. 33, 1911 (2005)
    [24]Giannuzzi, L. A.; Drown, J. L.; Brown, S. R.; Irwin, R. B.; Stevie,F.Micro. “Applications of the FIB lift-out technique for TEM specimen preparation.”Res. Technol.,41, 285. (1998)
    [25] P Ted Liang, Alan Stivers, Richard Livengood, Pei-Yang Yan,Guojing Zhang, and Fu-Chang Lo,“Progress in extreme ultraviolet mask repair using a focused ion beam”,J. Vac. Sci. Technol. B 18, 3216 (2000)
    [26] L. W. Swanson, G. A. Schwind and A. E. Bell, “Measurement of the energy distribution of a gallium liquid metal ion source”, J. Appl. Phys. 51, 3453 (1980)
    [27]Kuo H-S, Hwang I-S, Fu T-Y, Hwang Y-S, Lu Y-H, Lin C-Y,Tsong T T and Hou J-L,“A single-atom sharp iridiumtip as an emitter of gas field ion sources”.Nanotechnology.20 335701(2009)
    [28]熱穩定單原子針的製備、特性與應用前景,物理雙月刊(廿九卷一期) 2007年二月
    [29]Fowler, Ralph Howard, and L. Nordheim. “Electron emission in intense electric fields.”Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character (1928)
    [30]E. W. Muller, “Work Function of Tungsten Single Crystal Planes Measured by the Field Emission Microscope”,Z. Physik, 106,541
    [31]陳晏清, “鋪覆超薄膜於針狀金屬表面之現象研究”,國立台灣師範大學碩士論文(2011)
    [32]E. W. Muller, T. T. Tsong, “Field Ion Microscopy Principles and Applications”,American Elsevier Publishing Company(1969)
    [33]林砡君, “覆銠、銥於鎢針上產生的皺化行為及其相關研究”,國立台灣師範大學碩士論文 (2005)
    [34] Che, J. G., et al. “Faceting induced by ultrathin metal films: A first principles study.” Physical review letters 79.21 (1997)
    [35]Szczepkowicz, Andrzej, et al. “A comparison of adsorbate-induced faceting on flat and curved crystal surfaces.”Surface science 599.1(2005)
    [36]Tsong, Tien T. “Atom-Probe Field Ion Microscopy: Field Ion Emission, and Surfaces and Interfaces at Atomic Resolution.”Cambridge University Press,(2005)
    [37]真空技術與應用,行政院國家科學委員會精密儀器發展中心. (2001)
    [38]Nakamura, Shogo. “Field Evaporation of Metals in Field Ion Microscope.”Journal of Electron Microscopy 15.4(1966)
    [39]蘇冠宇,“場離子顯微鏡研究(1)量測覆銥單原子針場發射與場離子電流(2)鈮(100)表面觀察.”國立台灣師範大學碩士論文(2011)
    [40]李育賢,“以蝕刻吸附法備製覆銥鎢單原子級針尖與場發射電子電流量測.”國立台灣師範大學碩士論文(2009)

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