具有表面孔洞結構發光二極體內嵌入膠體量子點與銀奈米顆粒的光色轉換行為

Color Conversion Behaviors of Light-emitting Diodes with Colloidal Quantum Dots and Ag Nanoparticles Embedded in Surface Nano-hole Structures

黃昜毅(Yang-Yi Huang)

指導教授 ： 楊志忠

國立臺灣大學/電機資訊學院/光電工程學研究所/碩士(2021年)

https://doi.org/10.6342/NTU202102792

摘要

本實驗製作了三組藍光發光二極體樣品，包括表面深奈米孔洞，淺奈米孔洞以及無奈米孔洞的樣品。 深奈米孔洞樣品蝕刻深度貫穿整個量子井結構淺奈米孔洞樣品蝕刻深度則未達量子井結構 。 接著我們將紅光量子點,紅光量子點加上表面電漿子共振波長靠近紅光量子點發光波長之銀奈米顆粒以及紅光量子點加上表面電漿子共振波長靠近藍光量子井發光波長之銀奈米顆粒舖到上述三组樣品上我們將紅光量子點以及銀奈米顆粒浸入光阻中，利用標準光刻流程將其舖在樣品上設定區域結果顯示雖然銀奈米顆粒 會產生淬滅效果 而降低藍光轉紅光的光色轉換效率但在奈米孔洞結構內由於表面電漿子增強福斯特共振能量轉換以及表面電漿子引起之淬滅效應的減少使光色轉換效率恢復了一部分 。

關鍵字

發光二極體 ； 奈米孔洞 ； 量子點 ； 銀奈米顆粒

並列摘要

Three groups of blue-emitting light-emitting diode (LED) sample, including those with surface deep nano-holes, shallow nano-holes, and without nano-hole are fabricated. In a deep nano-hole, the whole quantum-well (QW) structure of the LED is etched. In a shallow nano-hole, the hole depth does not reach the QW structure. In either sample group, red-emitting quantum dots (QDs), the QDs plus Ag nanoparticles (NPs) with surface plasmon (SP) resonance close to QD emission wavelength, and the QDs plus Ag NPs with SP resonance close to LED QW emission wavelength are applied to LEDs to form three different samples. The QDs and Ag NPs are applied to the samples through their immersions in a photoresist and then a standard lithography procedure. The results show that generally the Ag NPs produce quenching effects to reduce the blue-to-red conversion. However, with the surface nano-holes, the conversion can be somewhat recovered due to the SP-enhanced Förster resonance energy transfer effect and the reduction of the SP-induced quenching effect.

並列關鍵字

Light-emitting Diodes ； Ag Nanoparticles ； Colloidal Quantum Dots ； Nano-hole Structures

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