高溫裂解碳源應用於奈米碳管成長

本文為過熱碳原料應用於奈米碳管成長之研究。因為奈米碳管具有優良的機械性質，其應用層面非常廣泛。奈米碳管能與傳統微機電製程所製作的微結構整合，預期能夠得到新款式的奈米尺度裝置。奈米碳管具有高度學術研究價值，引起許多學者專家的研究興趣。因此，奈米碳管被視為是未來高科技產業中最具潛力的材料。實驗方法主要利用化學氣相沉積法於置備均勻催化劑的試片表面生長奈米碳管，儀器設備是利用三段式的高溫爐並設定不同的溫度參數。一般來說，成長奈米碳管所需的催化劑來源可以利用電子束蒸鍍機，於試片基材上蒸鍍金屬或非金屬薄膜。鐵、鈷、鎳是常用的金屬薄膜催化劑。另一種常用催化劑是滴鐵蛋白試劑於試片，然後送入高溫爐生長碳管。利用金屬薄膜成長的奈米碳管大多數是多壁碳管，若金屬厚度越薄則越有機會成長出單壁碳管。鐵蛋白催化劑顆粒尺寸僅僅數奈米，有利於單壁碳管的生長。只要反應氣體參數控制得宜，成長出的碳管大多數會是單壁奈米碳管。因此，本文中將以鐵蛋白顆粒作為成長碳管的催化劑來源。實驗中將著重於反應氣體參數的控制，以期能在較低的溫度生長出單壁奈米碳管。過程中調配了幾種濃度不同的催化劑，除了比較在不同溫度下單位面積的碳管數量，更加以觀察其成長現象。三段式高溫爐的溫度設定依序為950℃、850℃、750℃，然後藉由反應氣體流量適當的改變，順利在750℃生長出單壁奈米碳管。最終，嘗試在更低的成長溫度700℃，亦順利生長出單壁奈米碳管，並將所有碳管成長結果加以歸納整理。希望本論文能夠為未來研究低溫成長碳管的學者提供些許參考價值。

關鍵字

奈米碳管；化學氣相沉積法

並列摘要

In this paper, we research overheated carbon source application for carbon nanotube growth. The application of carbon nanotube was broadly involved because of its remarkable mechanic properties. Carbon nanotube might be integrated with micro-scale structure of conventional MEMS fabrication, expected to obtain new types of nano-scale device. Carbon nanotube is provided with high worth of science academic research, and is attracting lots of savant’s great research interest. Hence, carbon nanotube is generally acknowledged as the most potential material for the future high technology industry. Experiment method of carbon nanotube growth would be chemical vapor deposition (CVD) on catalytically patterned substrate surfaces, equipment would be 3-stage furnace in different temperature parameter. Generally speaking, the catalyst source for carbon nanotube growth could be evaporated metallic or nonmetallic thin film on the substrate by means of E-beam evaporator. Iron、cobalt、nickel are the metal thin film catalyst in common use. Another method in common use would be dropped ferritin reagent as catalyst on the substrate, and move in the furnace for nanotube growth. Utilizing metal thin film for carbon nanotube growth would be multi-walled in majority. The thinner metal thin film is, the more chance to obtain single-walled carbon nanotube. Ferritin catalyst particle scale is only several nanometers, which is advantageous for single-walled carbon nanotube growth. Carbon nanotubes would be single-walled as long as the reaction gas parameter was controlled appropriately. Consequently, ferritin particle would be the catalyst source in this paper. We will emphasize the control of the reaction gas parameter in the experiment, and expect to grow single-walled carbon nanotube in lower temperature. We synthesize catalyst in different concentration, not only to compare with the numbers of carbon nanotube per unit area in different temperature, but also to observe the grow phenomenon. Temperature setup was 950℃、850℃、750℃ in order, and we obtain single-walled carbon nanotube in 750℃ successfully in the appropriate control of the reaction gas flow rate. Finally, we obtain single-walled carbon nanotube in lower temperature 700℃. We hope the research would provide worthy reference and be helpful for the following academician.

並列關鍵字

carbon nanotube ； CVD

參考文獻

[1] Sumio Iijima, “Helical microtubules of graphitic carbon,” Nature, 354, 56, (1991)

[2] Ebbesen TW, Ajayan PM., Nature, 358, 220, (1992)

[5] H. Baltes, O. Brand, G. K. Fedder, C. Hierold, J. Korvink, O. Tabata, “Carbon nanotubes and sensors : Review,” Advanced micro and nanosystems, Vol. 1, 357~382, (2004)

[9] Goo-Hwan Jeong, “Behavior of catalytic nanoparticles during chemical vapor deposition for carbon nanotube growth,” Chemical Physics Letters Vol. 422, NO. 1-3, pp.83-88, April 28, (2006)

[10] Matthieu Paillet, “Growth and physical properties of individual single-walled carbon nanotubes,” Diamond & Related Materials Vol. 14, 1426-1431, (2005)

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高溫裂解碳源應用於奈米碳管成長

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