漸變折射率含碳膜之製造與特性

Manufacturing and Properties of Carbon Films with Gradient-index

李岱倫(Dai-Luan Li)

指導教授 ： 蘇春熺

國立臺北科技大學/機電學院/機電整合研究所/碩士(2010年)

摘要

碳元素以不同的型態廣泛存在地球上，其中類鑽碳具有可藉由改變其sp2與sp3鍵結比例的不同而改變其材料特性優點，因此可利用改變製程參數來沈積不同折射率的類鑽碳膜，藉此達到漸變折射的效果。實驗中利用微波電漿束化學氣相沈積(Microwave Plasma Jet Chemical Vapor Deposition，MPJCVD)系統沈積類鑽碳薄膜於石英基板上，並對其進行結構與光學特性的檢測。
本研究主要有兩個重點，一是利用ANSYS中Workbench模擬軟體模擬腔體內和試片上壓力分佈的情形，一是藉由調整製程參數中甲烷比例和製程壓力來改變類鑽碳膜的性質，最後以連續改變腔體內壓力的方式沈積漸變折射的類鑽碳膜。
從模擬結果可看出，當在天線附近新增一套筒時，可使天線上端壓力降低，且試片上壓力可比原始結構提升約3到4 torr，另外也發現Meter2和Meter3位置的壓力計，其壓力值會較接近試片上方的壓力。
由實驗結果可知甲烷比率的提昇會增加膜層中sp2鍵結的數量，但是其晶粒尺寸會較小；工作氣壓的提昇也會影響sp2鍵結數量，但結果較不如改變甲烷比率來的明顯。最後使工作壓力在實驗中連續改變，沈積具有漸變折射的多層膜，並且從光學的量測中看出漸變折射對於提昇穿透率的效用。

關鍵字

漸變折射率 ； 類鑽碳 ； ANSYS

並列摘要

The different forms or allotropes of carbon are widespread on earth, such as that diamond-like carbon (DLC) can change properties by changing the ratio of sp2 and sp3 bonding. It can be used to change the experiment parameters to deposit the different refractive index of the diamond like carbon film to achieve a gradient-index film. The experiments are completed by microwave plasma jet chemical vapor deposition to deposit diamond-like carbon films on quartz substrate.
There are two subjects in this study. First is using the ANSYS to simulate the pressure distribution in chamber and on the substrate surface. The other is adjusting the experiments parameters to deposit different property of DLC. Finally continuously change the working pressure to deposit DLC film with gradient refraction.
It can be seen from the simulation results, when added a sleeve around the antenna is added, the pressure nearby the antenna is reduced, and the pressure on the sample is higher than original structure about 3 to 4 torr.
The experimental results show when the rate of methane is raised, the number of sp2 bonding in the film will increase too, but the grain size will be smaller. Working pressure is shown also to affect the number of sp2 bonding, but it's less obvious. Finally make a continuous change in working pressure is used to deposit multilayer with graded refraction, and optical measurements of the multilayer show the enhancement of transparency by gradient-index film.

並列關鍵字

Gradient-Index ； Diamond Like Carbon ； ANSYS

參考文獻

[8] 陳廷仁，低溫沈積類鑽碳薄膜於PET耳機振動膜之頻率響應研究，碩士論文，國立台北科技大學，台北，民國96年。

[21] 張靖郁，利用電漿放射光譜診斷MPJCVD系統成長奈米晶鑽石膜及其光電導特性研究，博士論文，國立台北科技大學機電科技研究所，台北，民國 97年。

[2] P. K. Bachmann and R. Messier, C&EN, May 15, 1989.

[10] W. G. Eversole, U.S. Patent,1962, No.3,030,188.

[11] J. J. Lander and J. Morrison, "Low energy electron diffraction study of the (111) diamond surface," Surf. Sci., 4 ,3 ,1966,241.