現在產業界裡,需要求高精度、高性能與高經濟之下,以線性馬達系統可容易達到所需要求,但也需要一套系統控制理論,將線性馬達控制到我們所需要目標。 本論文提出一個以順滑模態控制原理,屬於一種強健控制系統架構,對系統達到理想之控制及定位。在本篇採用兩個不同順滑模態(Sliding mode)架構。一個可變結構觀測器,這個控制架構主要目的是為估測出非線性速度響應,再利用所求出速度訊號放入LuGre摩擦力模型內部狀態,求取其他無法預知訊號,將所得到訊號放入順滑模態控制架構裡。另一各架構是順滑模態軌跡控制器,此順滑控制器控制採用位置誤差作為控制器內部條件,將馬達作動達到所要求之目標,且將軌跡誤差降低極小,符合控制系統要求。 最後,將系統的響應訊號與理想訊號作比較,由模擬與實驗結果裡,得知此控制理論方法可得到系統控制及降低摩擦力之影響。
The need for high speed and high precision motion control in the machine tool industry and in the manufacture of semiconductors is rapidly growing. In order to achieve the high precision requirement, friction effects have to be considered in the motion system. Friction will lead to tracking errors, limit cycles and undesired stick-slip motion. In this paper, a nonlinear state observer using variable structure systems theory is firstly proposed to estimate the velocity of linear motor. According to this estimated velocity, parameters of LuGre friction model and friction force are estimated based on closed velocity loop. When compared with the conventional open loop parameter estimation, this closed loop scheme is robust and remarkably reduces the effect of measurement noise. Then, a sliding mode controller with friction compensator is proposed to control the linear motor. It is effective to friction compensation and robust to parametric uncertainties. Finally, the proposed controller is evaluated and compared experimentally on a microcomputer, which is ported a multitasking real-time kernel, controlled linear motor positioning system. The simulated and experimented results show that the velocity error is drastically improved by the sliding mode controller with friction compensator in a linear motor system.