AISI 420M 工具鋼經離子氮化與超深冷處理後披覆DLC膜特性之研究

A Study of Characteristics of DLC Film Deposited on AISI 420M Tool Steel with Ion Nitriding and Cryogenic Treatments

許明輝(Ming-Hui Hsu)

指導教授 ： 唐自標

國立臺北科技大學/工程學院/材料及資源工程系研究所/碩士(2013年)

https://doi.org/10.6841/NTUT.2013.00748

摘要

本研究將AISI 420M工具鋼(試片A)進行超深冷處理(試片B)與離子氮化處理(試片C)後，以真空濺鍍法(Sputtering)於試片A、B、C表面披覆含鈦類鑽碳(DLC，Diamond Like Carbon)膜分別為試片D、E、F，透過基材與薄膜間加入中介層及改變基材表面硬度與組織結構的方式，分析類鑽碳膜耐磨耗性與附著性的差異，藉由掃描式電子顯微鏡(SEM)、硬度試驗、奈米壓痕試驗、水接觸角試驗及耐腐蝕試驗對其結構與性質進行分析。
實驗結果顯示，維氏硬度: C＞B＞A，奈米壓痕硬度: E＞D＞F由此可知基材經離子氮化與披覆DLC膜硬度皆會提升；磨耗實驗得知磨耗率: A＞D＞B＞E＞C＞F，所以基材經DLC鍍膜後能降低磨耗率及摩擦係數；水接觸角實驗可得知水接觸角度: A＞C＞B＞F＞D＞E，其角度與表面粗糙度有關；由拉曼光譜可得知由於I_D/I_G值偏高所以本研究為石墨化比例較高、硬度較低的DLC膜；由耐腐蝕實驗可以發現，腐蝕速率快慢為A＞C＞B＞D＞E＞F，由此可知基材披覆DLC膜抵抗腐蝕的能力最好。

關鍵字

離子氮化 ； 超深冷處理 ； 類鑽碳膜

並列摘要

In this study,STAVAX ESR stainless steel (specimen A）by using cryogenic treatment(specimen B) and ion nitriding treatment(specimen C), then coating diamond-like carbon (DLC) film on the surface of Specimen A, B ,C by usingsputtering, which can produce specimen D, E, F，through added interlayer between the substrate and the film and the substrate surface hardness and organizational structurechange, to analyze DLC film wear resistance and adhesive differences, by using scanning electron microscope (SEM), hardness test, nano-indenter test, water angle test and corrosion resistance test, to analyze the structure and properties.
Results show that，vickers hardness：C＞B＞A, nano-indenter hardness test：E＞D＞F. hardness of substrate can raise by ion nitriding treatment and deposited DLC film；wear rate：A＞D＞B＞E＞C＞F, substrate through coating can decrese wear rate and coefficient of friction；water angle test show A＞C＞B＞F＞D＞E, the angle relates to the ratio of surface roughness；Raman spectroscopy know that value of I_D/I_G is higher so graphitizing ratio of DLC film is higher and the hardness is lower,corrosion rate ：A＞C＞B＞D＞E＞F,deposited DLC film on substrate is the best for ability of corrosion resistance.

並列關鍵字

Ion Nitriding ； Cryogenic Treatments ； Diamond-like Carbon film

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