應用微波反應沸石固定床處理揮發性有機化合物之研究

半導體產業在台灣迅速成長，其製程需使用大量的有機溶劑，其中丙酮為主要排放之揮發性有機氣體之一，此污染物逸散至大氣中不但造成空氣污染，且對人們的健康造成危害。目前沸石濃縮轉輪吸附揮發性有機氣體為常見之技術，然而設備成本高，且會產生二次污染，因此本研究使用微波加熱沸石（ZSM-5）填充床，其設備與操作成本低且具有高效率。本研究選用的ZSM-5具有高吸附量、疏水性、高熱穩定性及水熱穩定性，易於再生循環使用等特色；微波具有較高之能源使用效率、較高穿透性及加熱速度快等特點，亦可節省大量能源之損耗。因此本研究探討不同進氣丙酮之濃度、不同之微波功率及不同之ZSM-5填充量，可得到不同的去除效率。研究結果顯示，隨著微波功率及ZSM-5填充量增加，對丙酮去除之效率也隨之增加，同時二氧化碳排放的濃度也有增加之趨勢；然而進氣之丙酮濃度為500 ppm時，有較佳的處理效率，造成上述之原因可能受溫度的影響。本實驗系統最佳去除效率的條件為ZSM-5填充量180 g及微波功率200W，此條件可使500 ppm及900 ppm之丙酮達到分別99.16%及98.9%之去除效率。此外，利用微波加熱反應，ZSM-5填充床內溫度隨微波輸出功率增加而上升，當微波輸出功率由100W增加至200W時，加熱10分鐘後填充床平均溫度由64℃增加到176℃。由SEM以及BET分析結果顯示，原始ZSM-5，其表面較為平整，而當微波的功率增加時，其孔洞大小有些微的增加，比表面積隨之上升。綜觀上述結果，利用微波加熱ZSM-5填充床系統可有效去除丙酮，平均去除效率介於90%~99%。

關鍵字

半導體業；丙酮；微波；固定床；沸石

並列摘要

Taiwan's semiconductor industry has grown rapidly in the recent years. Therefore, it demands a large amount of organic solvents which are pollution harms not only the environment but also human health. Among the acetone is mainly organic solvents of the semiconductor industry emissions. The zeolite rotor system is a common technology to treat organic solvents. However, the system has a higher equipment cost and secondary pollutants problem. Therefore, this study focuses on using the ZSM-5 with microwave system to treat acetone. The ZSM-5 has high adsorption volume, hydrophobicity, high thermal stability, hydrothermal and feature of the regeneration cycle. The microwave is an effective technology of organic pollutant removing. It has higher energy utilization, greater penetration ability, higher heating rates and saving a great amount of energy. Therefore, this research investigates the effect of acetone concentration, ZSM-5 weight and microwave power on the removal efficiency. The results show that the removal efficiency of acetone and the CO2 concentration of exhaust gas were increased with the weight of ZSM-5 and microwave power increased. However, the removal efficiency of lower concentration of acetone was better than the higher concentration. Because of the temperature of fixed-bed increased, which improved the removal efficiency and CO2 exhaust. The optimum removal efficiency 500 ppm and 900 ppm of acetone could reach above 99.16% and 98.9% respectively with microwave power of 200W and weight of ZSM-5 was 180g. Temperature of the ZSM-5 gradually rose from 64℃ to 176℃ under microwave power output 100W to 200W after 10 minutes. Therefore, the temperature of fixed-bed rose with higher microwave power output. According to SEM and BET analysis, the surface of ZSM-5 was smooth before microwave's radiation. As the microwave power increased, the crevices, holes and specific surface area of ZSM-5 were increased. Therefore, this study was useful to treatment of acetone by ZSM-5 in a fixed-bed with microwave system. The average removal efficiency of acetone was between 90% and 99%.

並列關鍵字

Semiconductor industry ； Acetone ； Microwave ； Fixed-bed ； Zeolite

參考文獻

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[1] Benoit Legras, Isabelle Polaert, Michel Thomas and Lionel Estel, "About using microwave irradiation in competitive adsorption processes," Applied Thermal Engineering, vol. 57, no. 1-2, 2013, pp. 164-171.

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應用微波反應沸石固定床處理揮發性有機化合物之研究

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