靜磁力驅動單晶矽微掃描面鏡之扭矩強化設計

The Torque-Enhancement Design for Silicon-based Micro Scanner Driven by Using Magneto-static Force

陳文健(Wen-Chien Chen)

指導教授 ： 方維倫

國立清華大學/工學院/動力機械工程學系/碩士(2008年)

https://doi.org/10.6843/NTHU.2008.00289

摘要

本論文藉由單晶矽具有高品質因子(Quality Factor)、高剛性及矽晶圓之拋光(Polish)面之特點，利用微機電製程技術製作一個以單晶矽為結構之雙軸微掃描面鏡，提出以靜磁力方式驅動元件；無須複雜導線分佈、電性連接、額外的磁鐵及軛鐵，僅需要提供磁超距力的載具即可。研究內容包含掃描面鏡設計準則的整理、靜磁力的理論介紹及動態系統推導，配合模擬與實驗來驗證其致動概念。除了藉由結構設計提高剛性與質量慣性矩比，以達成循序掃描之目的；亦調變矽基材上磁性材料的形狀來提升磁化量，以增加靜磁力輸出。元件特性量測方面，包含靜態方面的面鏡曲率半徑、鎳電鑄厚度、面鏡粗操度以及磁性材料不同形狀對扭矩之影響。動態方面則包含元件頻率響應、驅動功率與光學掃描角關係、磁化方向的影響以及掃描畫面的展示，以驗證此元件應用於投影顯示的可行性。

關鍵字

微機電技術 ； 靜磁力 ； 磁化 ； 掃描面鏡

並列摘要

This thesis presents a scanning mirror which is made of single crystal silicon structure with perfect reflective mirror plate, high quality factor, and high reliability. The driving force can be applied on the scanning mirror through the ferromagnetic material under the magnetic field. The design eliminates complicated coil routing and insulation layer deposition, and magnets. The rib structure on backside of mirror is designed to reduce the mass/stiffness ratio of the mirror plate. This study designs the “lever arm” structure and covered with ferromagnetic material to enhance the torque applied on the mirror. Beside, the magnetization of the ferromagnetic material is influenced by its planar geometry shape. Thus, this study also varying the geometric pattern of the ferromagnetic material covered on the “lever arm” to further increase the magneto-static force. The static measures of the scanning mirror include curvature and roughness of the mirror plate and thickness of ferromagnetic material. The dynamic measurement of the scanning mirror include frequency response, optical scanning angle versus driving power, affect by magnetization, and scanning pattern. The concept of magneto-static scanner is possible to apply to display refer to above measurements and testing.

並列關鍵字

MEMS ； Magnetostatic Force ； Magnetization ； Scanning Mirror

參考文獻

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