自動化物料搬運系統在晶圓製造廠之應用

Application of Automated Material Handling System in Semiconductor Manufacturing

游竣安(Hanson Yu)

指導教授 ： 陳建良

中原大學/工學院/工業工程研究所/碩士(2001年)

https://doi.org/10.6840/cycu200100434

摘要

自動化物料搬運系統AMHS (Automated Material Handling System) 應用於半導體晶圓製造廠包含Interbay及Intrabay兩大系統。Interbay系統包含整個軌道系統、倉儲系統、潔淨控制系統及多層樓傳送系統；Intrabay則包括在同一工作區之機台間之物料傳輸。
本研究主要探討並分析自動化物料搬運系統在目前半導體晶圓製造廠之應用情形，尤其對無塵室佈局設計之考量、整個AMHS之架構分析、Interbay 設計之考量與選用以及Intrabay目前在國內半導體晶圓製造廠之應用情形及須加強改善之處。目前300mm晶圓製造廠面臨製程技術及機台之更新、Mini-Environment 之應用、工廠自動化與物料搬運系統OHT、AGV、PGV、RGV之應用及新一代製程能力之需求等問題，這些將是十二吋晶圓廠亟待克服之重要課題。
本論文之新建廠房AMHS建置案例研究，可作為學術界與工業界之參考模式。相關資訊包括建廠專案小組之成立及任務分派，專案進行之流程，AMHS、潔淨室及產品製程規格需求之詳細規格說明。

關鍵字

區域內運輸 ； 晶圓製造 ； 區域間運輸 ； 自動化物料搬運系統

並列摘要

Automated material handling systems (AMHS) used in wafer fabrication plants include interbay and intrabay systems. Interbay system moves wafers between bays and consists of vehicle system, rail system, inventory system (called stocker), and cleanness control system. Intrabay system moves wafers between equipment in a bay.

This research reviews and analyzes the application of AMHS in wafer fabrication plants. The highlights include effects of AMHS on clean room design, structure and design of AMHS, selection procedure of AMHS, and status of application of AMHS in fabs in Taiwan. State-of-the-art technologies such as mini-environment, overhead transportation (OHT), automated guided vehicles (AGV), personal guided vehicles (PGV), and rail-guided vehicles (RGV) used in 300 mm fabs are also reviewed.

A case study of AMHS installation is presented, and it is a good reference model for academia and industry. Related information includes project team, project flow, AMHS specification, clean room specification, and product specification.

並列關鍵字

Wafer Fabrication ； Automated Material Handling Systems ； Interbay Transportation ； Intrabay Transportation

參考文獻

[11] P.K Hughes, J.D. Shoot, “The Future of Automation for High Volume Wafer

Driving the Golden Spike, 1999

[8] J. C. Chen, “A Practical Fab Design Procedure Part II: An Interbay

[9] J. C. Chen, “A Practical Fab Design Procedure Part I: An Interbay View”,

Automated Interbay Material Handling and Storage Systems for Large Wafer