無塵室皮帶輸送系統粉塵改善之研究

Study on the Reducing of Particle Production Capacity of the Clean Room Belt Conveyor System.

張育愷(YU-KAI CHANG)

指導教授 ： 陳夏宗

中原大學/工學院/機械工程研究所/碩士(2013年)

https://doi.org/10.6840/cycu201300166

摘要

無塵室晶圓盒皮帶式輸送機發展至今核心技術皆由外商公司所佔據，國內廠商想要進入卻苦無門路導致價格居高不下，由於大環境的影響造成半導體商有降低成本的壓力，因此在台灣尋求可行性的替代方案，所以進行本技術報告的研究。
本報告研究主要在探討皮帶輪與皮帶設計減少粉塵量的產生，利用CAE來分析作為皮帶與皮帶輪設計的依據，並且與傳統平皮帶進行比較，藉由盟立自動化所自製的輸送機進行空載運行粉塵量測。分別在四顆皮帶輪的位置-主動側A、主動側B、被動側A、被動側B進行個別量測，每個位置中又再分別取三點來量測。
量測結果發現不連續導條皮帶在行進間量測粉塵量還是有高於無塵室Class100標準，其中又以主動側A的位置最為嚴重，於是藉由被動式的護蓋將其粉塵量包覆在機台內，使粉塵量得以控制不會任意發散於空氣中，再次進行實驗驗證輸送機運轉量測粉塵量，量測結果成功達成規格要求，使粉塵0.3 μm控制在85~94顆、0.5 μ控制在37~41顆，皆已在無塵室Class 100的標準內。

關鍵字

皮帶 ； 皮帶輪 ； 輸送機

並列摘要

The development of the core technique for clean room FOUP belt conveyor is dominated by foreign companies till now, and there is no opportunity for domestic manufactures to enter this market segment so that the prices remain high. However, due to the trend of cost reduction nowadays, many semiconductor manufacturers start seeking for the alternative solution in Taiwan, which is cheaper, in order to gain more gross margin. Therefore, the alternative solution proposed is investigated in this study.
The main purpose of this report is to investigate the design of the particle control, which is to reduce it between pulleys and belts friction by making use of CAE to do analysis, and also to compare with the traditional flat belts through the conveyor developed by mirle to conduct the no load operation for the particle measurement. The measurement is performed at the location of four pulleys respectively-the driving side A and the driving side B, and the passive side A and the passive side B. Furthermore, each position is also divided into three points for measurement.
In this study, the result of the measurement shows that the volume of the particle measured for non continual belt is higher than the standard of FOUP Class 100, and the driving side A is the most serious position. Therefore, by means of using the passive cover to suppress the particle generated inside the machine, not to spread out in the air, the result successfully shows that the particle 0.3 μm is controlled under 85~94 particles, and 0.5μm is controlled under 37~41 particles, which is under the criteria of Class 100.

並列關鍵字

belts ； conveyor

參考文獻

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