磁浮渦輪真空幫浦之模糊控制

Fuzzy Control for Turbomolecular Pump Suspended By Active Magnetic Bearings

陳冠中(Kuan-Chung Chen)

指導教授 ： 范憶華

中原大學/工學院/機械工程研究所/碩士(2010年)

https://doi.org/10.6840/cycu201000094

摘要

摘 要
本文將模糊控制理論應用於磁浮渦輪真空幫浦轉子系统中，磁浮
轉子系统屬於非線性系统，具有本質不穩定性、多維系統耦合及難以建立精確數學模型等問題。模糊控制器不依賴精確數學模型、對於非線性系统及輸入和操作描述存在著不確定的系統,具有動態性能好、受系統參數變化影響小的優點，因此本文希望藉由模糊系統來自動調節整比例積分微分控制參數，以得到較好的控制性能。
本控制器的設計是結合了比例積分微分控制和模糊控制的優
點，先求出穩定的比例積分微分控制參數範圍，再運用模糊集合的概念，使得控制參數能隨系統狀態的改變做適當的調整。其設計過程是藉由專家或熟練的操作人員，對於受控系統過去的經驗累積和反應為依據，將其控制經驗歸納為定性描述的一種語言條件，然後利用模糊集合將其定量化，使其控制器能接受人的經驗，模仿人的操作策略形成一種啟發式判定規則之模糊比例積分微分控制器。
實驗結果可得知模糊比例積分微分控制器對於磁浮渦輪真空幫
浦轉子系统這種複雜對象的控制精度、稳定性和動態響應都有較好效
果。

關鍵字

磁浮渦輪真空幫浦轉子 ； 比例積分微分控制器 ； 模糊比例積分微分控制器

並列摘要

Abstract
This paper applied the fuzzy control theory to control the magnetic bearings supported turbo molecular pump. The active magnetic bearings supported rotor system is nonlinear and inherently unstable.Furthermore, it is a multivariable coupling system and difficult to build its mathematical model precisely. Fuzzy controllers do not need the precise mathematical model of the system. To the non-linear system or
the system that have uncertain description in the input or operating, the systems controlled by the fuzzy controllers also have good dynamic
performances and good adaptability while the parameter changing.Thus, the research tries to use the concept of fuzzy control to automatically adjust the gain of a conventional PID controller to get a better control performance.
The Fuzzy-PID controller conjoins the merits of the PID and fuzzy controller. We make sure the system in the range of stability by the
conventional PID controller firstly. Then, use the concept of the fuzzy set to suitably adjust the control parameters as the system is running.
The variations of the parameters are based on the experience and response of the operators and experts to the active magnetic bearings supported
rotor system. On the basis of the experience and response, we describe a linguistic variable and quantify it such that the proposed Fuzzy-PID
controller is able to vary with the response of the system, accept the people’s experience and form a heuristic sentential rule by imitated the
operational policy.
From the experiment results, the Fuzzy-PID controller got satisfied result in the aspects of responding velocity and steady precision to the active magnetic bearings supported turbo molecular pump system.

並列關鍵字

PID controller ； Fuzzy-PID controller ； turbo molecular pump

參考文獻

[8] 李志輝，模糊控制器應用於磁浮軸承之設計與實現，國立交通大學

[4] F. Matsumura, and T. Yoshimoto, “System Modeling and Control

[2] F. Matsumura, and H. Kobayashi, “Fundamental Equation for

Horizontal Shaft magnetic Bearing and its Control System Design,”

Magnetic-Bearing System for Horizontal Shaft and Its Experimental