熱脱附-氣相層析質譜儀分析液晶顯示器製造廠(LCD)廠無塵室中揮發性有機物

Evalution of Thermodesorption/Gas Chromatography/Mass Spectrometry for Monitoring of Volatile Organic Compounds in the Liquid Crystal Display Panels(LCD) Manufactory

洪崇原(Chung-Yuan Hung) ； 馮健泰(Jian-Tai Feng) ； 羅俊光(Jiunn-Guang Lo)

《健康管理學刊》 2卷1期 (2004/06) Pp. 51-60

https://doi.org/10.29805/JHM.200406.0004

摘要

利用多重床採樣管與自動化連續採樣器常溫下進行24小時採樣，每小時採一次，採樣後以冷凍濃縮自動脫附儀配合氣相層析質譜儀，對液晶顯示器製造廠作業環境中之11種揮發性有機化合物(VOCs)進行定性及定量分析；在採樣體積為1升，相對濕度 80%的條件下，方法偵測極限為0.38ppb~0.78ppb，平均樣品回收率則介於96.2%~98.2%之間；將所建立之方法實際應用於液晶顯示器製造廠之現場量測，A 應量測結果以丙二醇單甲基醚醋酸酯之平均濃度288.7ppb 為最高，乙酸正丁酯之平均濃度 237ppb次之。B廠量測結果中顯示，丙酮在每個製程區皆有被測得，以曝光區中濃度695.7ppb為最高，配向膜形成區之濃度1.5ppv最低，而丙二醇單甲基醚醋酸酯在光阻塗佈區濃度為最高，為23.1ppbv 。

關鍵字

熱脱附儀 ； 氣相層析質譜儀 ； 揮發性有機化合物 ； 液晶顯示器製造廠

並列摘要

This research aims at developing a method to qualitatively and quantitatively measure 10 volatile organic compounds (VOCs) by using multi-sorbents and autosampler which gathered hourly samples at the room temperature. The samples were injected to GC/MS a by thermal desorption system. Under the conditions of 80% relative humidity and 1 liter sampling volume, the result showed that the MDL was from 0.38 to 0.78ppbv and the relative recovery yield ranged from 96.2% to 98.2%.When applying this method to LCD manufactory, 11 target compounds were measured quantitatively. The average concentration of propylene glycol methyl ether acetate (PGMEA) butyl acetate and acetone were 288.7ppbv, 237.Oppbv and 75.9ppbv in respectively A manufactory. In B manufactory, acetone was measured in every manufacturing process section. The concentration of acetone was 695.7 ppbv in the photolithography process, while the concentration of propylene glycol methyl ether acetate (PGMEA) was 23.1 ppbv in photoresist zone.

並列關鍵字

Thermal desorption system ； GC/MS ； LCD manufactory ； VOCs