2 This thesis is a study about that effect of submonolayer Co on Ge(111)at different temperature. The Co and the Ge substrate will react to form Co-Ge compounds at room temperature. We observe many phenomena in real space by STM. The sample temperature varies from 400K to 965K, then cooled down to room temperature. The thermal effects are investigated from STM images. We find different characteristics in different heating processes, and try to distinguish them as possible as we can. STM images of the characteristics are called the meta-bright pot, the small bright pot, the hexagonal dark-pot, the periodic island and the dark-line. The first two have found in the STM images in all heating processes. The others appear at 500K, 700K, 965K, separately. Base on our experiments and related references, we infer that image of the meta-bright pot is similar to a Co 3-D island, the image of the small bright pot can be due to an impurity, the image of the hexagonal dark pot is an evidence of the formation of Co5Ge7, the image of the periodic island may be formed from a mismatch between Co and Ge lattice, and the dark-line image indicates a dimer-row occurs.