矽單晶上金屬超微電極之製備與電化學應用

鄭修偉

doi:10.6342/NTU.2010.01428

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矽單晶上金屬超微電極之製備與電化學應用

Metal Ultramicroelectrodes in Silicon: Preparation and Electrochemical Sensing

鄭修偉 , Masters　　Advisor：張哲政　　

英文 DOI： 10.6342/NTU.2010.01428

超微電極；矽晶圓；電化學；表面分析；歐傑電子能譜；掃瞄式歐傑電子影像；掃描式電子顯微圖；循環伏安法；電化學交流阻抗光譜； Ultramicroelectrode ； Silicon wafer ； electrochemistry ； surface analysis ； Auger electron spectroscopy ； Scanning electron microscopy ； Scanning Auger microscopy ； Cyclic voltammetry ； Electrochemical impedance spectroscopy

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Ultramicroelectrodes (UMEs) are wildly used in trace sample analysis and some kinetic reaction studies because of their fast mass transfer and low charging current properties. However, the small effective size of UMEs also leads to a decrease in Faradaic signal and results in a low signal-to-noise ratio. Ultramicroelectrode arrays (UMEAs) were thus developed to solve the problem. In general, the silicon technology used to fabricate UMEAs involves photolithography and chemical etching for properly controlling their structure. However, the technology uses sophisticated instruments, which makes the fabrication process costly. Its solvent waste also raises environmental concerns. In this study, we introduced a novel and facile method to fabricate UMEAs on silicon wafers. It has the advantages of low fabrication cost and of posing no harm to the environment. The UMEs were electrochemically developed from a copper-based line structure which was produced by the annealing in oxygen environment of a copper thin films deposited on silica-covered silicon chip. The resulting UMEA structure (termed silica-isolated UMEA, SUMEA) was studied using scanning electron microscopy (SEM) and scanning Auger electron microscopy (SAM); the SUMEA electrochemical properties were determined by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) in both ferrocene (organic) or ruthenium hexamine (aqueous). The results showed that there were multiple UMEs on a single chip. The Faradaic signal was enhanced while the unique UME properties were preserved. The kinetic calculations from the CVs were also agreed with the UME properties in SUMEA. Further electrical properties of SUMEA were analyzed using EIS, in which an equivalent circuit was assumed to describe the electrical conduction in SUMEA. The relative electrical parameters of the SUMEA were obtained using the impedance fitting in Nyquist plot, and confirmed by the kinetic calculation of the steady-state cyclic voltammogram, which shows the assumed equivalent circuit is suitable to describe the electrical behavior of the SUMEA.

Reference ( 48 ) 〈TOP〉

1 Harper, J.; Sailor, M. J. Anal. Chem., 1996, 68, 3713
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4 Feeney, R.; Kounaves, S. P. Electroanal., 2000, 12, 677
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12 He, L.; Musick, M. D.; Nicewarner, S. R. J. Am. Chem. Soc., 2000, 122, 9071
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14 B. E. Conway, Progress in Surface Science 1995, Vol. 49, No. 4, 331
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20 Bard, A. J.; Faulkner, L. R. Electrochemical Methods, Fundamentals and Applications, John Wiley & Sons: New York, 1980.
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