以計算流體力學模擬煙囪排氣對外氣空調箱進氣品質的影響。

馮郁寧

3.232.96.22，Hello！

Close
Search Quick Search Advanced Search Publication Search	Personal Service Member Login Searching History Use Bonus Card SYMSKAN
Browse Browse by University of Graduate Thesis Browse by Pinyin of Graduate Thesis Browse by Conference Proceedings Topic Browse by Conference Proceedings Publisher Browse by Pinyin of Conference Proceedings Browse by eBook Category Browse by eBook Topic Browse by eBook Publisher
Customer Services Authorize Airiti Recommend a Journal

Search Symbol (Half-width)	Description of Search Symbols
Space	"AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " )	Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" ： " image process "
?	Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
*	Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )
AND、OR、NOT	Boolean logic combinations of key words is a skill used to expand or refine search parameters. (1) AND (1) AND: Refines search parameters (2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters

DOI stands for Digital Object Identifier （ D igital O bject I dentifier ） ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「http://dx.doi.org/」「 http://dx.doi.org/ 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: http://dx.doi.org/ 10.5297/ser.1201.002 。
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI Registration （ doi.airiti.com ）。

Data Source

College of Mechanical and Electrical Engineering > Master's Program, Department of Air-conditioning and Refrigeration Engineering
Engineering > Municipal Engineering & Environment Engineering
Engineering > Electrical Engineering

Bibliography Management Tool

Related Links

Report an Issue

Search in Library

There is no full-text available at the moment. Airiti would like to request author's authorization. I would like to provide authorization.

以計算流體力學模擬煙囪排氣對外氣空調箱進氣品質的影響。

Numerical Investigation of Fresh Air Quality of Makeup Air Unit Influenced by Fab Exhaust.

馮郁寧 , Masters　　Advisor：胡石政　　

繁體中文

空氣分子汙染物；計算流體力學；室外環境； Airborne molecular contamination ； CFD ； Atmospheric Environment

Abstract │ Reference (19) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

As the semiconductor technology has shrunk the half-pitch (hp) node into nanometer scales, more attention has been directed toward the yield-affecting influences from the air quality of manufacturing environment. Re-entrainment of potential pollutants into the supply air, which released from the process exhaust system, through the make-up air unit can cause the secondary pollution in the semiconductor fab. In this study, the computational fluid dynamics (CFD) software-FLUENT was applied to investigate the impacts of varying atmospheric wind speeds and directions on the dispersion of pollutant plumes from process exhaust systems in a semiconductor fabrication plant, and the subsequent impacts on the potential of re-entrainment of pollutants into the supply air for semiconductor fab through the make-up air unit.
Result shows that in three different wind direction cases, the summer wind direction heavily affect the four MAU inlets on the newly build FAB roof. The result also shows when relocate the MAU inlets from outside to the inside, the inlet concentration change significantly. It is recommended to design the FAB layout by using the CFD technique as analysis tool in the future.

Reference ( 19 ) 〈TOP〉

[1]Li X X, Liu C H, Leung D Y C, et al. Recent progress in CFD modelling of wind field and pollutant transport in street canyons [J]. Atmospheric Environment, Vol. 40(29):5640–5658, 2006.
連結：
[3]Tominaga, Y., Murakami, S., Mochida, A. ”CFD prediction of gaseous diffusion around a cubic model using a dynamic mixed SGS model based on composite grid technique” Wind Engineering and Industrial Aerodynamics, Vol. 67-68, pp 827-841, 1997.
連結：
[4]Ronald L. Bingner, Fred D. Theurer. “AnnAGNPS technical processes documentation.”USDA-ARC National Sedimentation Laboratory.USDA-NRCS National Water and Climate Center, 2001.
連結：
[6] 陳威成「以擴散模式與計算流體力學進行車輛汙染排放模式驗證」，碩士論文，國立中興大學機械工程研究所，台中，2006。
連結：
[8]W. P. Jones and B. E. Launder, “The prediction of laminarization with a two-equation model of turbulence,”Int. J. Heat Mass Transfer,Vol.15, pp. 301-314, 1972.
連結：

Altmetrics

〈TOP〉

E-mail ：

When an article is available to download, a notice will be sent to your mailbox address.

E-mail ：