利用統計製程方法建立半導體微影系統機台風扇過濾裝置的監控系統

林郁晟

18.207.108.182，Hello！

Close
Search Quick Search Advanced Search Publication Search	Personal Service Member Login Searching History Use Bonus Card SYMSKAN
Browse Browse by University of Graduate Thesis Browse by Pinyin of Graduate Thesis Browse by Conference Proceedings Topic Browse by Conference Proceedings Publisher Browse by Pinyin of Conference Proceedings Browse by eBook Category Browse by eBook Topic Browse by eBook Publisher
Customer Services Authorize Airiti Recommend a Journal

Search Symbol (Half-width)	Description of Search Symbols
Space	"AND" indicates the intertwining of key terms used in a search
Double Quotation Marks ("") ( " " )	Double quotation marks indicate the beginning and end of a phrase, and the search will only include terms that appear in the same order of those within the quotations. Example: "image process" ： " image process "
?	Indicates a variable letter. Entering two ? will indicate two variable letters, and so on. Example: "Appl?", search results will yield apple, apply… e , appl y … ( (often used to English word searches) )
*	Indicates an unlimited number of variable letters to follow, from 1~n. Example: Enter "appl*", search results will yield apple, apples, apply, applied, application…(often used in English word searches) e , appl es , appl y , appl ied , appl ication … ( (often used to English word searches) )
AND、OR、NOT	Boolean logic combinations of key words is a skill used to expand or refine search parameters. (1) AND (1) AND: Refines search parameters (2) OR (2) OR: Expands search parameters (3) NOT: Excludes irrelevant parameters

DOI stands for Digital Object Identifier （ D igital O bject I dentifier ） ,
and is the unique identifier for objects on the internet. It can be used to create persistent link and to cite articles.

Using DOI as a persistent link

To create a persistent link, add「http://dx.doi.org/」「 http://dx.doi.org/ 」 before a DOI.
For instance, if the DOI of an article is 10.5297/ser.1201.002 , you can link persistently to the article by entering the following link in your browser: http://dx.doi.org/ 10.5297/ser.1201.002 。
The DOI link will always direct you to the most updated article page no matter how the publisher changes the document's position, avoiding errors when engaging in important research.

Cite a document with DOI

When citing references, you should also cite the DOI if the article has one. If your citation guideline does not include DOIs, you may cite the DOI link.

DOIs allow accurate citations, improve academic contents connections, and allow users to gain better experience across different platforms. Currently, there are more than 70 million DOIs registered for academic contents. If you want to understand more about DOI, please visit airiti DOI Registration （ doi.airiti.com ）。

Data Source

College of Engineering > Graduate Institute of Mechanical Engineering
Engineering > Mechanical Engineering

Bibliography Management Tool

Related Links

Report an Issue

Purchase Single Articles

Download PDF

利用統計製程方法建立半導體微影系統機台風扇過濾裝置的監控系統

Deploying Fan-filter Unit Monitor-oriented System of Photolithography Process by Using Statistical Process Control

林郁晟 , Masters　　Advisor：鍾文仁　　

繁體中文

統計製程管制；比流器；風扇過濾裝置；缺陷；品質改善歷程； Statistical Process Control ； Current Transformer ； Fan filter Unit ； Defect ； QC Story

Abstract │ Reference (16) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

Airflow stability is very important for the semiconductor manufacturing process, with a stable pressure (Down flow) to avoid blowing the wafer Particle pollution generated in the manufacturing process. But pressure value, and there is no standard value, has long experience in both the process by adjusting for this phenomenon is caused by an increase in the case of process variation. In addition, the devices provide air pressure, fan filter unit broken abnormal happened before, resulting in a large number of products abnormalities unaware of the case, or even scrapped. In this study, statistical process management architectures combine independent design, develop innovative management models, establish monitoring systems for wind pressure and make effective management and monitoring of FFU prevent damage event without warning, enhance the stability of the semiconductor manufacturing process. First, the management chaos phenomenon will pressure its unity, build pressure standard value, stable process range. Furthermore, the establishment of monitoring systems for production processes and FFU fan pressure to make timely monitoring. The results show that the system is currently successfully detect abnormal times, experience has shown that these three systems exert its effect in this study.

Reference ( 16 ) 〈TOP〉

[6] 林清河,桂楚華(2008). Total Quality Control and Six Sigma,華泰文化, P173-P235
連結：
[11] Meng-Ju Tsai(2012). Application of QC Story to Improve Particles Defect in Semiconductor Equipment, National Cheng Kung University, P26-P47
連結：
[12] Huei-Huang Lee (2011). Taguchi Methods: Principles and Practices of Quality Design, National Cheng Kung University, P52-P98
連結：
參考文獻
[1] 官生平(2005). 雲端計算統計製程管制,中華民國品質學會,三版, P22-P147

Altmetrics

〈TOP〉

E-mail ：

When an article is available to download, a notice will be sent to your mailbox address.

E-mail ：