利用統計製程方法建立半導體微影系統機台風扇過濾裝置的監控系統

林郁晟

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利用統計製程方法建立半導體微影系統機台風扇過濾裝置的監控系統

Deploying Fan-filter Unit Monitor-oriented System of Photolithography Process by Using Statistical Process Control

林郁晟 , Masters　　Advisor：鍾文仁　　

繁體中文

統計製程管制；比流器；風扇過濾裝置；缺陷；品質改善歷程； Statistical Process Control ； Current Transformer ； Fan filter Unit ； Defect ； QC Story

Abstract │ Reference (16) │ Altmetrics

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Airflow stability is very important for the semiconductor manufacturing process, with a stable pressure (Down flow) to avoid blowing the wafer Particle pollution generated in the manufacturing process. But pressure value, and there is no standard value, has long experience in both the process by adjusting for this phenomenon is caused by an increase in the case of process variation. In addition, the devices provide air pressure, fan filter unit broken abnormal happened before, resulting in a large number of products abnormalities unaware of the case, or even scrapped. In this study, statistical process management architectures combine independent design, develop innovative management models, establish monitoring systems for wind pressure and make effective management and monitoring of FFU prevent damage event without warning, enhance the stability of the semiconductor manufacturing process. First, the management chaos phenomenon will pressure its unity, build pressure standard value, stable process range. Furthermore, the establishment of monitoring systems for production processes and FFU fan pressure to make timely monitoring. The results show that the system is currently successfully detect abnormal times, experience has shown that these three systems exert its effect in this study.

Reference ( 16 ) 〈TOP〉

[6] 林清河,桂楚華(2008). Total Quality Control and Six Sigma,華泰文化, P173-P235
連結：
[11] Meng-Ju Tsai(2012). Application of QC Story to Improve Particles Defect in Semiconductor Equipment, National Cheng Kung University, P26-P47
連結：
[12] Huei-Huang Lee (2011). Taguchi Methods: Principles and Practices of Quality Design, National Cheng Kung University, P52-P98
連結：
參考文獻
[1] 官生平(2005). 雲端計算統計製程管制,中華民國品質學會,三版, P22-P147

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