運用於光學連結模組之矽基光學平台技術

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運用於光學連結模組之矽基光學平台技術

Silicon Optical Bench For Optical Interconnect Modules

蕭旭良 , Masters　　Advisor：伍茂仁　　

繁體中文

V型凹槽陣列； 45°微反射面；光學連結模組；矽基光學平台； 45°micro-reflector ； V-groove array ； Optical Interconnect connect ； Silicon Optical Bench

Abstract │ Reference (8) │ Times Cited (1) │ Altmetrics

Abstract 〈TOP〉

Parallel Abstract 〈TOP〉

With the computing speed of computers up to several GHz and above, the telecommunications bandwidth through the traditional copper wire will be inadequate. Thus, incorporating optical light as a transmitting media will substantially improve most current interconnect technology due to its high transmission speed. Silicon optical bench technology for optical interconnect applications provides specific characteristics of miniaturized sizes, a good heat spreading, and so on. In addition, the fabrication process can be achieved by employing a standard semiconductor process technology. Therefore, it provides assembly with highly precise alignment, and mass-production possibilities. 
In this paper, a free-space optical interconnect technology, which can serve as a board on board and/or USB 3.0 applications, is realized by using a silicon-optical bench. The transceiver module on the silicon micro-optical bench includes of a monolithic 45∘micro-reflector, V-groove fiber array, high frequency transmission line for 2.5 GHz and bonding pads. 
The designed silicon optical bench is possessed of a 45∘micro-reflector with 110 ?m. And the process tolerance can be controlled within 6%. Through the ray-tracing simulation methods, the coupling efficiency of transceiver and receiver part reaches up to -6 dB and -2 dB, respectively.

Reference ( 8 ) 〈TOP〉

1. Andrew C. Alduino, San Jose, CA(US); Mario J. Paniccia, Santa Clara, CA(US), “Method and apparatus providing an electrical-optical coupler”, (US patent NO. 7,306,378, USA, 2007)
連結：
2. Yasuhiko Aoki, Toshio Kato, Rogerio Jun Mizuno, Kenichi Iga, “Micro-optical bench for alignment-free optical coupling”, (OSA, Applied Physics,1999)
連結：
3. Kenji Tokoro et al., “Anisotropic Etching Properties of Silicon in KOH and TMAH Solutions”, IEEE International Symposium on Micromechatronics and Human Science,1998, p.65-69.
連結：
4. 張育誠,“微型光學讀取頭之元件”, (中央大學光電所碩士論文, 台灣, 2003)
連結：
5. I. Zubel, “Silicon anisotropic etching in alkaline solutions III: On the possibility of spatial structures forming in the course of Si(100) anisotropic etching in KOH and KOH+IPA solutions”, Sensors and Actuators A: Physical, 84, p. 116-125,2000
連結：

Times Cited (1) 〈TOP〉

張碩甫(2011)。改善高速光連接系統訊號完整性之被動等化器研製。中央大學電機工程學系學位論文。2011。1-60。

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